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Shinichi Sekiguchi

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Patents Grantslast 30 patents

  • Information Patent Grant

    Vacuum evacuation system
    • Patent number 10,978,315
    • Issue date Apr 13, 2021
    • Ebara Corporation
    • Atsushi Shiokawa
    • G05 - CONTROLLING REGULATING
  • Information Patent Grant

    Vacuum pump with abatement function
    • Patent number 10,641,272
    • Issue date May 5, 2020
    • Ebara Corporation
    • Koichi Iwasaki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Vacuum pump with abatement function
    • Patent number 10,641,256
    • Issue date May 5, 2020
    • Ebara Corporation
    • Hiroki Furuta
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Fan scrubber and vacuum pump apparatus
    • Patent number 10,040,026
    • Issue date Aug 7, 2018
    • Ebara Corporation
    • Hiroki Furuta
    • H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
  • Information Patent Grant

    Turbo vacuum pump
    • Patent number 8,172,515
    • Issue date May 8, 2012
    • Ebara Corporation
    • Hiroyasu Kawashima
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Grant

    Turbo vacuum pump and semiconductor manufacturing apparatus having...
    • Patent number 8,066,495
    • Issue date Nov 29, 2011
    • Ebara Corporation
    • Shinichi Sekiguchi
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Grant

    Turbo vacuum pump
    • Patent number 7,938,619
    • Issue date May 10, 2011
    • Ebara Corporation
    • Hiroyuki Kawasaki
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Grant

    Turbo vacuum pump and semiconductor manufacturing apparatus having...
    • Patent number 7,717,684
    • Issue date May 18, 2010
    • Ebara Corporation
    • Shinichi Sekiguchi
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Grant

    Vacuum pump and semiconductor manufacturing apparatus
    • Patent number 7,645,126
    • Issue date Jan 12, 2010
    • Ebara Corporation
    • Shinichi Sekiguchi
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Grant

    Turbo vacuum pump
    • Patent number 7,645,116
    • Issue date Jan 12, 2010
    • Ebara Corporation
    • Hiroyuki Kawasaki
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Grant

    Liquid diluting device
    • Patent number 7,108,014
    • Issue date Sep 19, 2006
    • Mikuni Corporation
    • Shinichi Sekiguchi
    • Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
  • Information Patent Grant

    Liquid dilution device
    • Patent number 6,929,033
    • Issue date Aug 16, 2005
    • Mikuni Corporation
    • Shinichi Sekiguchi
    • Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
  • Information Patent Grant

    Liquid dilution device
    • Patent number 6,929,027
    • Issue date Aug 16, 2005
    • Mikuni Corporation
    • Shinichi Sekiguchi
    • Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
  • Information Patent Grant

    Excimer laser apparatus
    • Patent number 6,809,448
    • Issue date Oct 26, 2004
    • Ebara Corporation
    • Natsushi Suzuki
    • H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
  • Information Patent Grant

    Liquid dilution device
    • Patent number 6,789,571
    • Issue date Sep 14, 2004
    • Mikuni Corporation
    • Shinichi Sekiguchi
    • Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
  • Information Patent Grant

    Electric discharge gas laser
    • Patent number 6,785,314
    • Issue date Aug 31, 2004
    • Ebara Corporation
    • Atushi Ooyama
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Gas transfer machine
    • Patent number 6,700,273
    • Issue date Mar 2, 2004
    • Ebara Corporation
    • Yoshinori Ojima
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Grant

    Discharge-pumped excimer laser device
    • Patent number 6,603,787
    • Issue date Aug 5, 2003
    • Ebara Corporation
    • Shinichi Sekiguchi
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Discharge-pumped excimer laser device
    • Patent number 6,539,043
    • Issue date Mar 25, 2003
    • Ebara Corporation
    • Hiroyuki Shinozaki
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Magnetic bearing and circulation fan apparatus
    • Patent number 6,519,273
    • Issue date Feb 11, 2003
    • Ebara Corporation
    • Shinichi Sekiguchi
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Circulation fan apparatus and circulation-fan driving motor
    • Patent number 6,464,472
    • Issue date Oct 15, 2002
    • Ebara Corporation
    • Shinichi Sekiguchi
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Grant

    Magnetic bearing device for motor-combined structure
    • Patent number 6,455,966
    • Issue date Sep 24, 2002
    • Ebara Corporation
    • Toshimitsu Barada
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Excimer laser apparatus
    • Patent number 6,404,794
    • Issue date Jun 11, 2002
    • Ebara Corporation
    • Shinichi Sekiguchi
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Excimer laser device
    • Patent number 6,366,039
    • Issue date Apr 2, 2002
    • Ebara Corporation
    • Shinichi Sekiguchi
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Apparatus for controlling magnetic levitation system
    • Patent number 6,359,767
    • Issue date Mar 19, 2002
    • Ebara Corporation
    • Atsusi Ooyama
    • F01 - MACHINES OR ENGINES IN GENERAL ENGINE PLANTS IN GENERAL STEAM ENGINES
  • Information Patent Grant

    Magnetic bearing device
    • Patent number 6,326,712
    • Issue date Dec 4, 2001
    • Ebara Corporation
    • Toshiharu Nakazawa
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...

Patents Applicationslast 30 patents

  • Information Patent Application

    VACUUM EVACUATION SYSTEM
    • Publication number 20170200622
    • Publication date Jul 13, 2017
    • EBARA CORPORATION
    • Atsushi SHIOKAWA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FAN SCRUBBER AND VACUUM PUMP APPARATUS
    • Publication number 20170007961
    • Publication date Jan 12, 2017
    • EBARA CORPORATION
    • Hiroki FURUTA
    • B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
  • Information Patent Application

    VACUUM PUMP WITH ABATEMENT FUNCTION
    • Publication number 20150260192
    • Publication date Sep 17, 2015
    • EBARA CORPORATION
    • Koichi IWASAKI
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    VACUUM PUMP WITH ABATEMENT FUNCTION
    • Publication number 20150260174
    • Publication date Sep 17, 2015
    • EBARA CORPORATION
    • Hiroki FURUTA
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    TURBO VACUUM PUMP AND SEMICONDUCTOR MANUFACTURING APPARATUS HAVING...
    • Publication number 20100047096
    • Publication date Feb 25, 2010
    • EBARA CORPORATION
    • Shinichi Sekiguchi
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    TURBO VACUUM PUMP
    • Publication number 20090196734
    • Publication date Aug 6, 2009
    • EBARA CORPORATION
    • Hiroyasu Kawashima
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    Turbo vacuum pump
    • Publication number 20090142183
    • Publication date Jun 4, 2009
    • Hiroyuki Kawasaki
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    Spray Device
    • Publication number 20080142617
    • Publication date Jun 19, 2008
    • Shoji Kasuya
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Application

    Vacuum evacuation device and method, and substrate processing appar...
    • Publication number 20070048145
    • Publication date Mar 1, 2007
    • Katsutoshi Ishii
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    Turbo vacuum pump
    • Publication number 20060263205
    • Publication date Nov 23, 2006
    • Hiroyuki Kawasaki
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    Liquid diluting device
    • Publication number 20050217744
    • Publication date Oct 6, 2005
    • Shinichi Sekiguchi
    • B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
  • Information Patent Application

    Turbo vacuum pump and semiconductor manufacturing apparatus having...
    • Publication number 20050042118
    • Publication date Feb 24, 2005
    • EBARA CORPORATION
    • Shinichi Sekiguchi
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    Vacuum pump and semiconductor manufacturing apparatus
    • Publication number 20050025640
    • Publication date Feb 3, 2005
    • Shinichi Sekiguchi
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    Liquid dilution device
    • Publication number 20040221898
    • Publication date Nov 11, 2004
    • Shinichi Sekiguchi
    • B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
  • Information Patent Application

    Excimer laser apparatus
    • Publication number 20030107283
    • Publication date Jun 12, 2003
    • Natsushi Suzuki
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Liquid dilution device
    • Publication number 20030106598
    • Publication date Jun 12, 2003
    • Shinichi Sekiguchi
    • B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
  • Information Patent Application

    Magnetic bearing and magnetic levitation apparatus
    • Publication number 20030107282
    • Publication date Jun 12, 2003
    • Atsushi Ooyama
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Application

    Liquid dilution device
    • Publication number 20020100514
    • Publication date Aug 1, 2002
    • Shinichi Sekiguchi
    • B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
  • Information Patent Application

    Electric discharge gas laser
    • Publication number 20010050940
    • Publication date Dec 13, 2001
    • Atushi Ooyama
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Application

    Magnetic bearing and circulation fan apparatus
    • Publication number 20010017877
    • Publication date Aug 30, 2001
    • EBARA CORPORATION
    • Shinichi Sekiguchi
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...