Shinichi SHINOZUKA

Person

Koshi-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Bonding apparatus and bonding method
- Patent number 11,348,791
- Issue date May 31, 2022
- Tokyo Electron Limited
- Toshifumi Inamasu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Temperature control method of heat processing plate, computer stora...
- Patent number 8,698,052
- Issue date Apr 15, 2014
- Tokyo Electron Limited
- Masahide Tadokoro
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate processing method, computer-readable storage medium and s...
- Patent number 8,253,077
- Issue date Aug 28, 2012
- Tokyo Electron Limited
- Kunie Ogata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Temperature control method of heat processing plate, computer stora...
- Patent number 8,242,417
- Issue date Aug 14, 2012
- Tokyo Electron Limited
- Masahide Tadokoro
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Temperature setting method and apparatus for a thermal processing p...
- Patent number 8,135,487
- Issue date Mar 13, 2012
- Tokyo Electron Limited
- Megumi Jyousaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate measuring method, computer-readable recording medium reco...
- Patent number 8,041,525
- Issue date Oct 18, 2011
- Tokyo Electron Limited
- Yoshihiro Kondo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method, computer-readable storage medium and s...
- Patent number 7,985,516
- Issue date Jul 26, 2011
- Tokyo Electron Limited
- Kunie Ogata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Temperature setting method of thermal processing plate, computer-re...
- Patent number 7,968,825
- Issue date Jun 28, 2011
- Tokyo Electron Limited
- Megumi Jyousaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature setting method for thermal processing plate, temperatur...
- Patent number 7,957,828
- Issue date Jun 7, 2011
- Tokyo Electron Limited
- Masahide Tadokoro
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Temperature setting method of thermal processing plate, computer-re...
- Patent number 7,897,896
- Issue date Mar 1, 2011
- Tokyo Electron Limited
- Megumi Jyousaka
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate-processing apparatus, substrate-processing method, substr...
- Patent number 7,867,674
- Issue date Jan 11, 2011
- Tokyo Electron Limited
- Michio Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate measuring method, computer-readable recording medium reco...
- Patent number 7,822,574
- Issue date Oct 26, 2010
- Tokyo Electron Limited
- Kunie Ogata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of controlling substrate processing apparatus and substrate...
- Patent number 7,529,595
- Issue date May 5, 2009
- Tokyo Electron Limited
- Shinichi Shinozuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate defect inspection method, computer readable storage mediu...
- Patent number 7,411,669
- Issue date Aug 12, 2008
- Tokyo Electron Limited
- Hiroshi Tomita
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
BONDING SYSTEM AND INSPECTION METHOD OF INSPECTING COMBINED SUBSTRATE
- Publication number 20220415673
- Publication date Dec 29, 2022
- TOKYO ELECTRON LIMITED
- Yoshitaka Otsuka
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
BONDING APPARATUS AND BONDING METHOD
- Publication number 20220254636
- Publication date Aug 11, 2022
- TOKYO ELECTRON LIMITED
- Toshifumi Inamasu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
BONDING APPARATUS AND BONDING METHOD
- Publication number 20200381255
- Publication date Dec 3, 2020
- TOKYO ELECTRON LIMITED
- Toshifumi Inamasu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE CONTROL METHOD OF HEAT PROCESSING PLATE, COMPUTER STORA...
- Publication number 20120279955
- Publication date Nov 8, 2012
- TOKYO ELECTRON LIMITED
- Masahide TADOKORO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE PROCESSING METHOD, COMPUTER-READABLE STORAGE MEDIUM AND S...
- Publication number 20110242513
- Publication date Oct 6, 2011
- TOKYO ELECTRON LIMITED
- Kunie OGATA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING METHOD, COMPUTER-READABLE STORAGE MEDIUM AND S...
- Publication number 20090269686
- Publication date Oct 29, 2009
- TOKYO ELECTRON LIMITED
- Kunie OGATA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE-PROCESSING APPARATUS, SUBSTRATE-PROCESSING METHOD, SUBSTR...
- Publication number 20090104548
- Publication date Apr 23, 2009
- TOKYO ELECTRON LIMITED
- Michio Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TEMPERATURE SETTING METHOD FOR THERMAL PROCESSING PLATE, TEMPERATUR...
- Publication number 20080257495
- Publication date Oct 23, 2008
- TOKYO ELECTRON LIMITED
- Masahide Tadokoro
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TEMPERATURE SETTING METHOD FOR THERMAL PROCESSING PLATE, TEMPERATUR...
- Publication number 20080257496
- Publication date Oct 23, 2008
- TOKYO ELECTRON LIMITED
- Megumi JYOUSAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE SETTING METHOD OF THERMAL PROCESSING PLATE, COMPUTER-RE...
- Publication number 20080142508
- Publication date Jun 19, 2008
- TOKYO ELECTRON LIMITED
- Megumi JYOUSAKA
- G05 - CONTROLLING REGULATING
Information Patent Application
TEMPERATURE SETTING METHOD OF THERMAL PROCESSING PLATE, COMPUTER-RE...
- Publication number 20080105669
- Publication date May 8, 2008
- TOKYO ELECTRON LIMITED
- Megumi JYOUSAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE MEASURING METHOD, COMPUTER-READABLE RECORDING MEDIUM RECO...
- Publication number 20080091381
- Publication date Apr 17, 2008
- TOKYO ELECTRON LIMITED
- Kunie OGATA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE MEASURING METHOD, COMPUTER-READABLE RECORDING MEDIUM RECO...
- Publication number 20080074657
- Publication date Mar 27, 2008
- TOKYO ELECTRON LIMITED
- Yoshihiro Kondo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE CONTROL METHOD OF HEAT PROCESSING PLATE, COMPUTER STORA...
- Publication number 20070272680
- Publication date Nov 29, 2007
- TOKYO ELECTRON LIMITED
- Masahide TADOKORO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE DEFECT INSPECTION METHOD, COMPUTER READABLE STORAGE MEDIU...
- Publication number 20070182955
- Publication date Aug 9, 2007
- TOKYO ELECTRON LIMITED
- Hiroshi Tomita
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method of controlling substrate processing apparatus and substrate...
- Publication number 20070088450
- Publication date Apr 19, 2007
- Shinichi Shinozuka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Shinichi SHINOZUKA

Person

Patents Grantslast 30 patents

Bonding apparatus and bonding method

Temperature control method of heat processing plate, computer stora...

Substrate processing method, computer-readable storage medium and s...

Temperature control method of heat processing plate, computer stora...

Temperature setting method and apparatus for a thermal processing p...

Substrate measuring method, computer-readable recording medium reco...

Substrate processing method, computer-readable storage medium and s...

Temperature setting method of thermal processing plate, computer-re...

Temperature setting method for thermal processing plate, temperatur...

Temperature setting method of thermal processing plate, computer-re...

Substrate-processing apparatus, substrate-processing method, substr...

Substrate measuring method, computer-readable recording medium reco...

Method of controlling substrate processing apparatus and substrate...

Substrate defect inspection method, computer readable storage mediu...

Patents Applicationslast 30 patents

BONDING SYSTEM AND INSPECTION METHOD OF INSPECTING COMBINED SUBSTRATE

BONDING APPARATUS AND BONDING METHOD

BONDING APPARATUS AND BONDING METHOD

TEMPERATURE CONTROL METHOD OF HEAT PROCESSING PLATE, COMPUTER STORA...

SUBSTRATE PROCESSING METHOD, COMPUTER-READABLE STORAGE MEDIUM AND S...

SUBSTRATE PROCESSING METHOD, COMPUTER-READABLE STORAGE MEDIUM AND S...

SUBSTRATE-PROCESSING APPARATUS, SUBSTRATE-PROCESSING METHOD, SUBSTR...

TEMPERATURE SETTING METHOD FOR THERMAL PROCESSING PLATE, TEMPERATUR...

TEMPERATURE SETTING METHOD FOR THERMAL PROCESSING PLATE, TEMPERATUR...

TEMPERATURE SETTING METHOD OF THERMAL PROCESSING PLATE, COMPUTER-RE...

TEMPERATURE SETTING METHOD OF THERMAL PROCESSING PLATE, COMPUTER-RE...

SUBSTRATE MEASURING METHOD, COMPUTER-READABLE RECORDING MEDIUM RECO...

SUBSTRATE MEASURING METHOD, COMPUTER-READABLE RECORDING MEDIUM RECO...

TEMPERATURE CONTROL METHOD OF HEAT PROCESSING PLATE, COMPUTER STORA...

SUBSTRATE DEFECT INSPECTION METHOD, COMPUTER READABLE STORAGE MEDIU...

Method of controlling substrate processing apparatus and substrate...