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Shinichi Tomizawa
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Annaka, JP
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Patents Grants
last 30 patents
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Patent Grant
Method of fabricating bonded wafer
Patent number
7,531,425
Issue date
May 12, 2009
Shin-Etsu Handotai Co., Ltd.
Masatake Nakano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for producing bonding wafer
Patent number
6,884,696
Issue date
Apr 26, 2005
Shin-Etsu Handotai Co., Ltd.
Hiroji Aga
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Bonded wafer producing method and bonded wafer
Patent number
6,797,632
Issue date
Sep 28, 2004
Shin-Etsu Handotai Co., Ltd.
Masatake Nakano
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Production method for silicon wafer and soi wafer, and soi wafer
Publication number
20050020030
Publication date
Jan 27, 2005
Masatake Nakano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for producing bonding wafer
Publication number
20030181001
Publication date
Sep 25, 2003
Hiroji Aga
H01 - BASIC ELECTRIC ELEMENTS