Shinichi Umeno

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Kumamoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Liquid supply device and liquid supply method
- Patent number 11,626,298
- Issue date Apr 11, 2023
- Tokyo Electron Limited
- Yusuke Takamatsu
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,158,525
- Issue date Oct 26, 2021
- Tokyo Electron Limited
- Yasuhiro Takaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid processing apparatus
- Patent number 10,714,365
- Issue date Jul 14, 2020
- Tokyo Electron Limited
- Tetsurou Iriyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate liquid processing apparatus
- Patent number 10,573,539
- Issue date Feb 25, 2020
- Tokyo Electron Limited
- Hiroshi Komiya
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240128101
- Publication date Apr 18, 2024
- TOKYO ELECTRON LIMITED
- Atsushi ANAMOTO
- G05 - CONTROLLING REGULATING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240021445
- Publication date Jan 18, 2024
- TOKYO ELECTRON LIMITED
- Hiroki SAKURAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID SUPPLY DEVICE AND LIQUID SUPPLY METHOD
- Publication number 20210111043
- Publication date Apr 15, 2021
- TOKYO ELECTRON LIMITED
- Yusuke TAKAMATSU
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20190067048
- Publication date Feb 28, 2019
- Tokyo Electron Limited
- Yasuhiro Takaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS
- Publication number 20180358240
- Publication date Dec 13, 2018
- TOKYO ELECTRON LIMITED
- Hiroshi Komiya
- B08 - CLEANING
Information Patent Application
LIQUID PROCESSING APPARATUS
- Publication number 20180330974
- Publication date Nov 15, 2018
- Tokyo Electron Limited
- Tetsurou Iriyama
- H01 - BASIC ELECTRIC ELEMENTS