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Shinichi Wada
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Yamanashi, JP
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last 30 patents
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Patent Grant
Semiconductor manufacturing plant
Patent number
8,387,559
Issue date
Mar 5, 2013
Toyo Tanso Co., Ltd.
Jiro Hiraiwa
C01 - INORGANIC CHEMISTRY
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last 30 patents
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Patent Application
SEMICONDUCTOR MANUFACTURING PLANT
Publication number
20100064969
Publication date
Mar 18, 2010
Toyo Tanso Co., Ltd.
Jiro Hiraiwa
F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS