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Shinichiro HAYASAKA
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Miyagi-gun, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method and apparatus for measuring gas flow
Patent number
11,899,476
Issue date
Feb 13, 2024
Tokyo Electron Limited
Risako Matsuda
G01 - MEASURING TESTING
Information
Patent Grant
Method of determining output flow rate of gas output by flow rate c...
Patent number
10,316,835
Issue date
Jun 11, 2019
Tokyo Electron Limited
Jun Yamashima
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Gas supply method
Patent number
9,732,909
Issue date
Aug 15, 2017
Tokyo Electron Limited
Shinichiro Hayasaka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus, control method adopted in substrate...
Patent number
8,859,046
Issue date
Oct 14, 2014
Tokyo Electron Limited
Hiroshi Nakamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gas supply system, substrate processing apparatus and gas supply me...
Patent number
8,790,529
Issue date
Jul 29, 2014
Tokyo Electron Limited
Shinichiro Hayasaka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Gas supply system, substrate processing apparatus and gas supply me...
Patent number
7,896,967
Issue date
Mar 1, 2011
Tokyo Electron Limited
Shinichiro Hayasaka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
METHOD AND APPARATUS FOR MEASURING GAS FLOW
Publication number
20210263540
Publication date
Aug 26, 2021
TOKYO ELECTRON LIMITED
Risako Matsuda
G05 - CONTROLLING REGULATING
Information
Patent Application
METHOD OF DETERMINING OUTPUT FLOW RATE OF GAS OUTPUT BY FLOW RATE C...
Publication number
20180106247
Publication date
Apr 19, 2018
TOKYO ELECTRON LIMITED
Jun YAMASHIMA
F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information
Patent Application
GAS SUPPLY METHOD
Publication number
20140332100
Publication date
Nov 13, 2014
TOKYO ELECTRON LIMITED
Shinichiro HAYASAKA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, CONTROL METHOD ADOPTED IN SUBSTRATE...
Publication number
20120046774
Publication date
Feb 23, 2012
TOKYO ELECTRON LIMITED
Hiroshi Nakamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GAS SUPPLY SYSTEM, SUBSTRATE PROCESSING APPARATUS AND GAS SUPPLY ME...
Publication number
20110120563
Publication date
May 26, 2011
TOKYO ELECTRON LIMITED
Shinichiro HAYASAKA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GAS SUPPLY SYSTEM, SUBSTRATE PROCESSING APPARATUS AND GAS SUPPLY ME...
Publication number
20070181255
Publication date
Aug 9, 2007
TOKYO ELECTRON LIMITED
Shinichiro HAYASAKA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Substrate processing apparatus, control method adopted in substrate...
Publication number
20060176928
Publication date
Aug 10, 2006
TOKYO ELECTRON LIMITED
Hiroshi Nakamura
H01 - BASIC ELECTRIC ELEMENTS