Shinichiro Hirai

Person

Saitama-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Surface inspection apparatus, processing system, and method of manu...
- Patent number 11,749,546
- Issue date Sep 5, 2023
- Canon Kabushiki Kaisha
- Kohei Suzuki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and method of manufacturing ar...
- Patent number 10,234,775
- Issue date Mar 19, 2019
- Canon Kabushiki Kaisha
- Shinichiro Hirai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Interferometer system, lithography apparatus, and article manufactu...
- Patent number 9,804,510
- Issue date Oct 31, 2017
- Canon Kabushiki Kaisha
- Zenichi Hamaya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Interferometric measurement of rotation of stage apparatus and adju...
- Patent number 9,217,937
- Issue date Dec 22, 2015
- Canon Kabushiki Kaisha
- Zenichi Hamaya
- G01 - MEASURING TESTING
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 8,130,360
- Issue date Mar 6, 2012
- Canon Kabushiki Kaisha
- Shinichiro Hirai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device fabrication method
- Patent number 7,889,319
- Issue date Feb 15, 2011
- Canon Kabushiki Kaisha
- Naoto Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus, optical member, and device manufactu...
- Patent number 7,787,103
- Issue date Aug 31, 2010
- Canon Kabushiki Kaisha
- Shinichiro Hirai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
MEASURING METHOD OF MEASURING SUBSTRATE BY CAPTURING IMAGES OF MARK...
- Publication number 20240288787
- Publication date Aug 29, 2024
- Canon Kabushiki Kaisha
- WATARU YAMAGUCHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FOREIGN MATTER INSPECTION APPARATUS, FOREIGN MATTER INSPECTION METH...
- Publication number 20220291144
- Publication date Sep 15, 2022
- Canon Kabushiki Kaisha
- Yuichi Fujita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SURFACE INSPECTION APPARATUS, PROCESSING SYSTEM, AND METHOD OF MANU...
- Publication number 20210082726
- Publication date Mar 18, 2021
- Canon Kabushiki Kaisha
- Kohei Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD OF MANUFACTURING AR...
- Publication number 20180143542
- Publication date May 24, 2018
- Canon Kabushiki Kaisha
- Shinichiro Hirai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTERFEROMETER SYSTEM, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTU...
- Publication number 20140198307
- Publication date Jul 17, 2014
- Zenichi Hamaya
- G01 - MEASURING TESTING
Information Patent Application
STAGE APPARATUS AND ADJUSTMENT METHOD THEREOF, EXPOSURE APPARATUS,...
- Publication number 20140125962
- Publication date May 8, 2014
- Canon Kabushiki Kaisha
- Zenichi Hamaya
- G01 - MEASURING TESTING
Information Patent Application
EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD
- Publication number 20090207400
- Publication date Aug 20, 2009
- Canon Kabushiki Kaisha
- Naoto Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION EXPOSURE APPARATUS, OPTICAL MEMBER, AND DEVICE MANUFACTU...
- Publication number 20080094597
- Publication date Apr 24, 2008
- Canon Kabushiki Kaisha
- Shinichiro Hirai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20080036990
- Publication date Feb 14, 2008
- Canon Kabushiki Kaisha
- Shinichiro Hirai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Shinichiro Hirai

Person

Patents Grantslast 30 patents

Surface inspection apparatus, processing system, and method of manu...

Exposure apparatus, exposure method, and method of manufacturing ar...

Interferometer system, lithography apparatus, and article manufactu...

Interferometric measurement of rotation of stage apparatus and adju...

Exposure apparatus and device manufacturing method

Exposure apparatus and device fabrication method

Projection exposure apparatus, optical member, and device manufactu...

Patents Applicationslast 30 patents

MEASURING METHOD OF MEASURING SUBSTRATE BY CAPTURING IMAGES OF MARK...

FOREIGN MATTER INSPECTION APPARATUS, FOREIGN MATTER INSPECTION METH...

SURFACE INSPECTION APPARATUS, PROCESSING SYSTEM, AND METHOD OF MANU...

EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD OF MANUFACTURING AR...

INTERFEROMETER SYSTEM, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTU...

STAGE APPARATUS AND ADJUSTMENT METHOD THEREOF, EXPOSURE APPARATUS,...

EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD

PROJECTION EXPOSURE APPARATUS, OPTICAL MEMBER, AND DEVICE MANUFACTU...

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD