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Shinichiro KAWAKAMI
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Koshi City, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method for forming mask pattern, storage medium, and apparatus for...
Patent number
12,002,676
Issue date
Jun 4, 2024
Tokyo Electron Limited
Takashi Yamauchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method, substrate processing apparatus, and co...
Patent number
11,604,415
Issue date
Mar 14, 2023
Tokyo Electron Limited
Takashi Yamauchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming mask pattern, storage medium, and apparatus for...
Patent number
11,508,580
Issue date
Nov 22, 2022
Tokyo Electron Limited
Takashi Yamauchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus, substrate processing method and rec...
Patent number
11,036,140
Issue date
Jun 15, 2021
Tokyo Electron Limited
Shinichiro Kawakami
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate processing apparatus, substrate processing method and com...
Patent number
10,955,743
Issue date
Mar 23, 2021
Tokyo Electron Limited
Hiroshi Mizunoura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Coating and developing method and coating and developing apparatus
Patent number
10,732,508
Issue date
Aug 4, 2020
Tokyo Electron Limited
Shinichiro Kawakami
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Substrate treatment method and thermal treatment apparatus
Patent number
10,656,526
Issue date
May 19, 2020
Tokyo Electron Limited
Yohei Sano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Coating and developing method and coating and developing apparatus
Patent number
10,394,125
Issue date
Aug 27, 2019
Tokyo Electron Limited
Shinichiro Kawakami
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Substrate processing apparatus, substrate processing method and rec...
Patent number
10,139,732
Issue date
Nov 27, 2018
Tokyo Electron Limited
Shinichiro Kawakami
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus, resist pattern forming method, and storage medium
Patent number
10,101,669
Issue date
Oct 16, 2018
Tokyo Electron Limited
Seiji Nagahara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate treatment system
Patent number
10,025,190
Issue date
Jul 17, 2018
Tokyo Electron Limited
Seiji Nagahara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate treatment method, computer storage medium and substrate t...
Patent number
9,810,987
Issue date
Nov 7, 2017
Tokyo Electron Limited
Makoto Muramatsu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Substrate processing method, storage medium and substrate processin...
Patent number
9,748,100
Issue date
Aug 29, 2017
Tokyo Electron Limited
Tomonori Esaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process sequence for reducing pattern roughness and deformity
Patent number
9,097,977
Issue date
Aug 4, 2015
Tokyo Electron Limited
Shinichiro Kawakami
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR FORMING MASK PATTERN, STORAGE MEDIUM, AND APPARATUS FOR...
Publication number
20240274438
Publication date
Aug 15, 2024
TOKYO ELECTRON LIMITED
Takashi YAMAUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT APPARATUS
Publication number
20240248413
Publication date
Jul 25, 2024
TOKYO ELECTRON LIMITED
Takeshi SHIMOAOKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
THERMAL TREATMENT APPARATUS, THERMAL TREATMENT METHOD, AND STORAGE...
Publication number
20240234174
Publication date
Jul 11, 2024
TOKYO ELECTRON LIMITED
Kentaro YAMAMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATMENT METHOD, SUBSTRATE TREATMENT APPARATUS, AND COMP...
Publication number
20240120217
Publication date
Apr 11, 2024
TOKYO ELECTRON LIMITED
Shinichiro KAWAKAMI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND RE...
Publication number
20240027923
Publication date
Jan 25, 2024
TOKYO ELECTRON LIMITED
Tomoya ONITSUKA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
HEAT TREATMENT APPARATUS, HEAT TREATMENT METHOD, AND RECORDING MEDIUM
Publication number
20230393483
Publication date
Dec 7, 2023
TOKYO ELECTRON LIMITED
Shinichiro Kawakami
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD
Publication number
20230176484
Publication date
Jun 8, 2023
Tokyo Electron Limited
Shinichiro KAWAKAMI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FORMING MASK PATTERN, STORAGE MEDIUM, AND APPARATUS FOR...
Publication number
20230042982
Publication date
Feb 9, 2023
TOKYO ELECTRON LIMITED
Takashi YAMAUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND CO...
Publication number
20210208504
Publication date
Jul 8, 2021
TOKYO ELECTRON LIMITED
Takashi YAMAUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODF FOR FORMING MASK PATTERN, STORAGE MEDIUM, AND APPARATUS FOR...
Publication number
20200279736
Publication date
Sep 3, 2020
Takashi YAMAUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...
Publication number
20200233308
Publication date
Jul 23, 2020
TOKYO ELECTRON LIMITED
Shinichiro Kawakami
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
COATING AND DEVELOPING METHOD AND COATING AND DEVELOPING APPARATUS
Publication number
20190332013
Publication date
Oct 31, 2019
TOKYO ELECTRON LIMITED
Shinichiro KAWAKAMI
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND COM...
Publication number
20190317407
Publication date
Oct 17, 2019
TOKYO ELECTRON LIMITED
Hiroshi MIZUNOURA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...
Publication number
20180284616
Publication date
Oct 4, 2018
TOKYO ELECTRON LIMITED
Shinichiro Kawakami
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE TREATMENT METHOD AND THERMAL TREATMENT APPARATUS
Publication number
20180164689
Publication date
Jun 14, 2018
TOKYO ELECTRON LIMITED
Yohei SANO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COATING AND DEVELOPING METHOD AND COATING AND DEVELOPING APPARATUS
Publication number
20180088466
Publication date
Mar 29, 2018
TOKYO ELECTRON LIMITED
Shinichiro KAWAKAMI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATMENT SYSTEM
Publication number
20170031245
Publication date
Feb 2, 2017
TOKYO ELECTRON LIMITED
Seiji NAGAHARA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EXPOSURE APPARATUS, RESIST PATTERN FORMING METHOD, AND STORAGE MEDIUM
Publication number
20160327869
Publication date
Nov 10, 2016
TOKYO ELECTRON LIMITED
Seiji NAGAHARA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE PROCESSING METHOD, STORAGE MEDIUM AND SUBSTRATE PROCESSIN...
Publication number
20160163560
Publication date
Jun 9, 2016
TOKYO ELECTRON LIMITED
Tomonori ESAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATMENT METHOD, COMPUTER STORAGE MEDIUM AND SUBSTRATE T...
Publication number
20160124307
Publication date
May 5, 2016
TOKYO ELECTRON LIMITED
Makoto MURAMATSU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PROCESS SEQUENCE FOR REDUCING PATTERN ROUGHNESS AND DEFORMITY
Publication number
20130309615
Publication date
Nov 21, 2013
TOKYO ELECTRON LIMITED
Shinichiro Kawakami
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY