Shinichiro KAWAKAMI

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Watervliet, NY, US

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Patents Grantslast 30 patents

Information Patent Grant
High normality solution for removing freeze material in lithographi...
- Patent number 8,389,206
- Issue date Mar 5, 2013
- Tokyo Electron Limited
- Shannon W. Dunn
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
HEAT-TREATING METHOD, HEAT-TREATING APPARATUS, AND STORAGE MEDIUM
- Publication number 20240347354
- Publication date Oct 17, 2024
- TOKYO ELECTRON LIMITED
- Ryouichirou NAITOU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE CHEMICAL TREATMENT PROCESS FOR REDUCING PATTERN DEFECT
- Publication number 20130040246
- Publication date Feb 14, 2013
- TOKYO ELECTRON LIMITED
- Shinichiro KAWAKAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
High normality solution for removing freeze material in lithographi...
- Publication number 20110070545
- Publication date Mar 24, 2011
- TOKYO ELECTRON LIMITED
- Shannon W. DUNN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY