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Shinichiro Nohdo
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Kanagawa, JP
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Patents Grants
last 30 patents
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Patent Grant
Exposure device, exposure method, and semiconductor device manufact...
Patent number
7,456,031
Issue date
Nov 25, 2008
Sony Corporation
Shinji Omori
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
WAFER, EXPOSURE MASK, METHOD OF DETECTING MARK AND METHOD OF EXPOSURE
Publication number
20070115471
Publication date
May 24, 2007
Shinichiro Nohdo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Complementary division mask having alignment mark, method for formi...
Publication number
20060152723
Publication date
Jul 13, 2006
Shinichiro Nohdo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Exposure device, exposure method, and semiconductor device manufact...
Publication number
20060151710
Publication date
Jul 13, 2006
Shinji Omori
B82 - NANO-TECHNOLOGY
Information
Patent Application
Mask, semiconductor device manufacturing method, and semiconductor...
Publication number
20050145892
Publication date
Jul 7, 2005
SONY CORPORATION
Shinichiro Nohdo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Wafer, exposure mask, method of detecting mark and method of exposure
Publication number
20040227945
Publication date
Nov 18, 2004
Shinichiro Nohdo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY