Shinichiro Shimomura

Person

Tosu-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,183,396
- Issue date Nov 23, 2021
- Tokyo Electron Limited
- Shinichiro Shimomura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate liquid processing apparatus having nozzle with multiple f...
- Patent number 9,922,849
- Issue date Mar 20, 2018
- Tokyo Electron Limited
- Yasuyuki Ido
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method, substrate processing apparatus, and st...
- Patent number 9,362,106
- Issue date Jun 7, 2016
- Sony Corporation
- Hayato Iwamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process liquid changing method and substrate processing apparatus
- Patent number 9,278,768
- Issue date Mar 8, 2016
- Tokyo Electron Limited
- Masatoshi Kasahara
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Substrate processing apparatus for maintaining a more uniform tempe...
- Patent number 9,027,573
- Issue date May 12, 2015
- Tokyo Electron Limited
- Hironobu Hyakutake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning apparatus and cleaning method
- Patent number 6,357,458
- Issue date Mar 19, 2002
- Tokyo Electron Limited
- Hiroshi Tanaka
- B08 - CLEANING
Information Patent Grant
Method for cleaning a workpiece
- Patent number 6,241,827
- Issue date Jun 5, 2001
- Tokyo Electron Limited
- Hiroshi Tanaka
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230073624
- Publication date Mar 9, 2023
- TOKYO ELECTRON LIMITED
- Shinichiro Shimomura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20230022814
- Publication date Jan 26, 2023
- TOKYO ELECTRON LIMITED
- Saya Inoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200335356
- Publication date Oct 22, 2020
- TOKYO ELECTRON LIMITED
- Shinichiro Shimomura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS AND SUBSTRATE LIQUID PROCESSI...
- Publication number 20150318183
- Publication date Nov 5, 2015
- TOKYO ELECTRON LIMITED
- Yasuyuki Ido
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND ST...
- Publication number 20140080312
- Publication date Mar 20, 2014
- Hayato IWAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS LIQUID CHANGING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20130220478
- Publication date Aug 29, 2013
- TOKYO ELECTRON LIMITED
- Masatoshi KASAHARA
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
- Publication number 20110290279
- Publication date Dec 1, 2011
- TOKYO ELECTRON LIMITED
- Hironobu HYAKUTAKE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Cleaning apparatus and cleaning method
- Publication number 20010011548
- Publication date Aug 9, 2001
- TOKYO ELECTRON LIMITED
- Hiroshi Tanaka
- B08 - CLEANING

Shinichiro Shimomura

Person

Patents Grantslast 30 patents

Substrate processing method and substrate processing apparatus

Substrate liquid processing apparatus having nozzle with multiple f...

Substrate processing method, substrate processing apparatus, and st...

Process liquid changing method and substrate processing apparatus

Substrate processing apparatus for maintaining a more uniform tempe...

Cleaning apparatus and cleaning method

Method for cleaning a workpiece

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE LIQUID PROCESSING APPARATUS AND SUBSTRATE LIQUID PROCESSI...

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND ST...

PROCESS LIQUID CHANGING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...

Cleaning apparatus and cleaning method