Shinichiro Taguchi

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Chiba, JP

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Patents Applicationslast 30 patents

Information Patent Application
Magnetron sputtering method and magnetron sputtering apparatus
- Publication number 20070158180
- Publication date Jul 12, 2007
- ULVAC, Inc.
- Atsushi Ota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...