Shiniji Nagai

Follow

Person

Hiratsuka-shi, JP

People

Patents Applicationslast 30 patents

Information Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS
- Publication number 20120097869
- Publication date Apr 26, 2012
- Gigaphoton, Inc.
- Yoshifumi Ueno
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR