Shiniti Matamura

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Yokohama-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Matching circuit and plasma processing apparatus
- Patent number 6,707,253
- Issue date Mar 16, 2004
- Matsushita Electric Industrial Co., Ltd.
- Kenji Sumida
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Matching circuit and plasma processing apparatus
- Publication number 20030136519
- Publication date Jul 24, 2003
- Kenji Sumida
- H01 - BASIC ELECTRIC ELEMENTS