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Shinji Asari
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Austin, TX, US
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last 30 patents
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Patent Grant
Thermal processing system with improved process gas flow and method...
Patent number
7,632,354
Issue date
Dec 15, 2009
Tokyo Electron Limited
Anthony Dip
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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last 30 patents
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Patent Application
THERMAL PROCESSING SYSTEM WITH IMPROVED PROCESS GAS FLOW AND METHOD...
Publication number
20080035055
Publication date
Feb 14, 2008
TOKYO ELECTRON LIMITED
Anthony Dip
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...