Shinji Ebisu

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Ehime, JP

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Patents Grantslast 30 patents

Information Patent Grant
Ion implantation apparatus and method for processing plurality of w...
- Patent number 10,468,283
- Issue date Nov 5, 2019
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Tetsuya Kudo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion implantation apparatus and control method for ion implantation...
- Patent number 9,666,413
- Issue date May 30, 2017
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Yoshito Fujii
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ION IMPLANTATION APPARATUS AND METHOD FOR PROCESSING PLURALITY OF W...
- Publication number 20170040197
- Publication date Feb 9, 2017
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Tetsuya Kudo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION IMPLANTATION APPARATUS AND CONTROL METHOD FOR ION IMPLANTATION...
- Publication number 20150364299
- Publication date Dec 17, 2015
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Yoshito Fujii
- H01 - BASIC ELECTRIC ELEMENTS