Shinji FUCHIGAMI

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Shower head, plasma processing apparatus and plasma processing method
- Patent number 9,466,468
- Issue date Oct 11, 2016
- Tokyo Electron Limited
- Nobuyuki Okayama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma etching method
- Patent number 9,048,191
- Issue date Jun 2, 2015
- Tokyo Electron Limited
- Shuichiro Uda
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SHOWER HEAD, PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20140291286
- Publication date Oct 2, 2014
- TOKYO ELECTRON LIMITED
- Nobuyuki OKAYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA ETCHING METHOD
- Publication number 20140113450
- Publication date Apr 24, 2014
- TOKYO ELECTRON LIMITED
- Shuichiro Uda
- H01 - BASIC ELECTRIC ELEMENTS