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Shinji Fukui
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Utsunomiya-shi, JP
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last 30 patents
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Patent Application
SUBSTRATE HOLDING BOARD, MANUFACTURING METHOD OF DEVICE, AND EXPOSU...
Publication number
20230125632
Publication date
Apr 27, 2023
Canon Kabushiki Kaisha
Shinji Fukui
B32 - LAYERED PRODUCTS
Information
Patent Application
OPTICAL COMPONENT AND OPTICAL APPARATUS
Publication number
20220128749
Publication date
Apr 28, 2022
Canon Kabushiki Kaisha
Shinji Fukui
G02 - OPTICS
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Patent Application
METHOD OF PRODUCING AN OPTICAL DEVICE
Publication number
20110129659
Publication date
Jun 2, 2011
Canon Kabushiki Kaisha
Koji Teranishi
G02 - OPTICS
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Patent Application
OPTICAL ELEMENT FOR X-RAY
Publication number
20090148695
Publication date
Jun 11, 2009
Canon Kabushiki Kaisha
Takayuki Miura
B82 - NANO-TECHNOLOGY