Shinji FURUKAWA

Person

Nirasaki City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Hard mask and hard mask forming method
- Patent number 11,469,106
- Issue date Oct 11, 2022
- Tokyo Electron Limited
- Hiroyuki Toshima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film-forming device
- Patent number 11,410,837
- Issue date Aug 9, 2022
- Tokyo Electron Limited
- Hiroyuki Toshima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming later insulating films for MTJ
- Patent number 10,910,215
- Issue date Feb 2, 2021
- Tokyo Electron Limited
- Naoki Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 10,468,237
- Issue date Nov 5, 2019
- Tokyo Electron Limited
- Atsushi Gomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming copper film
- Patent number 10,189,230
- Issue date Jan 29, 2019
- Tokyo Electron Limited
- Hiroyuki Toshima
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Method and processing apparatus for performing pre-treatment to for...
- Patent number 10,068,798
- Issue date Sep 4, 2018
- Tokyo Electron Limited
- Hiroyuki Toshima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 10,049,860
- Issue date Aug 14, 2018
- Tokyo Electron Limited
- Atsushi Gomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum-processing apparatus, vacuum-processing method, and storage...
- Patent number 9,790,590
- Issue date Oct 17, 2017
- Tokyo Electron Limited
- Shinji Furukawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dual-target sputter deposition with controlled phase difference bet...
- Patent number 9,567,667
- Issue date Feb 14, 2017
- Tokyo Electron Limited
- Shinji Furukawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus and film forming method
- Patent number 9,551,060
- Issue date Jan 24, 2017
- Tokyo Electron Limited
- Atsushi Gomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of supplying cobalt to recess
- Patent number 9,362,167
- Issue date Jun 7, 2016
- Tokyo Electron Limited
- Atsushi Shimada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film forming apparatus
- Patent number 8,715,417
- Issue date May 6, 2014
- Canon Anelva Corporation
- Shinji Furukawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus
- Patent number 8,377,210
- Issue date Feb 19, 2013
- Anelva Corporation
- Shinji Furukawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for manufacturing magnetic recording disk, and in-line ty...
- Patent number 8,147,924
- Issue date Apr 3, 2012
- Canon Anelva Corporation
- Naoki Watanabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus
- Patent number 7,935,187
- Issue date May 3, 2011
- Anelva Corporation
- Shinji Furukawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for manufacturing magnetic recording disk, and in-line ty...
- Patent number 7,824,497
- Issue date Nov 2, 2010
- Canon Anelva Corporation
- Naoki Watanabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Manufacturing apparatus of magnetoresistance elements
- Patent number 7,731,825
- Issue date Jun 8, 2010
- Canon Anelva Corporation
- Toru Kitada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus
- Patent number 7,625,450
- Issue date Dec 1, 2009
- Canon Anelva Corporation
- Shinji Furukawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System for depositing a film
- Patent number 6,872,285
- Issue date Mar 29, 2005
- Anelva Corporation
- Shinji Furukawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multilayer film deposition apparatus, and method and apparatus for...
- Patent number 6,740,209
- Issue date May 25, 2004
- Anelva Corporation
- Masahiro Shibamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing a magnetic recording disk
- Patent number 6,572,934
- Issue date Jun 3, 2003
- Anelva Corporation
- Naoki Watanabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
FILM FORMING APPARATUS
- Publication number 20230167542
- Publication date Jun 1, 2023
- TOKYO ELECTRON LIMITED
- Junichi TAKEI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HARD MASK AND HARD MASK FORMING METHOD
- Publication number 20200266063
- Publication date Aug 20, 2020
- TOKYO ELECTRON LIMITED
- Hiroyuki TOSHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HARD MASK AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
- Publication number 20200227273
- Publication date Jul 16, 2020
- TOKYO ELECTRON LIMITED
- Hiroyuki TOSHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM-FORMING DEVICE
- Publication number 20200071815
- Publication date Mar 5, 2020
- TOKYO ELECTRON LIMITED
- Hiroyuki TOSHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20180315585
- Publication date Nov 1, 2018
- TOKYO ELECTRON LIMITED
- Atsushi Gomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Forming Insulating Film
- Publication number 20180012756
- Publication date Jan 11, 2018
- TOKYO ELECTRON LIMITED
- Naoki WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING COPPER FILM
- Publication number 20180001597
- Publication date Jan 4, 2018
- Hiroyuki TOSHIMA
- B32 - LAYERED PRODUCTS
Information Patent Application
METHOD AND PROCESSING APPARATUS FOR PERFORMING PRE-TREATMENT TO FOR...
- Publication number 20170372951
- Publication date Dec 28, 2017
- TOKYO ELECTRON LIMITED
- Hiroyuki TOSHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Forming Perpendicular Magnetization Type Magnetic Tunnel...
- Publication number 20170317273
- Publication date Nov 2, 2017
- TOKYO ELECTRON LIMITED
- Toru KITADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING APPARATUS
- Publication number 20160071707
- Publication date Mar 10, 2016
- TOKYO ELECTRON LIMITED
- Shinji FURUKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20160032446
- Publication date Feb 4, 2016
- TOKYO ELECTRON LIMITED
- Atsushi GOMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Supplying Cobalt to Recess
- Publication number 20150243556
- Publication date Aug 27, 2015
- TOKYO ELECTRON LIMITED
- Atsushi SHIMADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20150235815
- Publication date Aug 20, 2015
- TOKYO ELECTRON LIMITED
- Atsushi Gomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Vacuum-Processing Apparatus, Vacuum-Processing Method, and Storage...
- Publication number 20150187546
- Publication date Jul 2, 2015
- TOKYO ELECTRON LIMITED
- Shinji Furukawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS
- Publication number 20150114835
- Publication date Apr 30, 2015
- TOKYO ELECTRON LIMITED
- Atsushi GOMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DUAL-TARGET SPUTTER DEPOSITION WITH CONTROLLED PHASE DIFFERENCE BET...
- Publication number 20150075971
- Publication date Mar 19, 2015
- TOKYO ELECTRON LIMITED
- Shinji FURUKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS
- Publication number 20130133571
- Publication date May 30, 2013
- ANELVA CORPORATION
- Shinji Furukawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS
- Publication number 20110192344
- Publication date Aug 11, 2011
- ANELVA CORPORATION
- Shinji Furukawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus for Manufacturing Magnetic Recording Disk, and In-Line Ty...
- Publication number 20090151634
- Publication date Jun 18, 2009
- Canon ANELVA Corporation
- Naoki WATANABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MANUFACTURING METHOD AND MANUFACTURING APPARATUS OF MAGNETORESISTAN...
- Publication number 20090139855
- Publication date Jun 4, 2009
- Canon ANELVA Corporation
- Toru Kitada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus for Manufacturing Magnetic Recording Disk, and In-Line Ty...
- Publication number 20090011140
- Publication date Jan 8, 2009
- Canon ANELVA Corporation
- Naoki WATANABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus for Manufacturing Magnetic Recording Disk, and In-Line Ty...
- Publication number 20080216744
- Publication date Sep 11, 2008
- Canon ANELVA Corporation
- Naoki WATANABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus for Manufacturing Magnetic Recording Disk, and In-Line Ty...
- Publication number 20080178804
- Publication date Jul 31, 2008
- Canon ANELVA Corporation
- Naoki WATANABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS
- Publication number 20080178796
- Publication date Jul 31, 2008
- ANELVA CORPORATION
- Shinji Furukawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus for Manufacturing Magnetic Recording Disk, and In-Line Ty...
- Publication number 20070234958
- Publication date Oct 11, 2007
- Canon ANELVA Corporation
- Naoki WATANABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Manufacturing Method And Manufacturing Apparatus Of Magnetoresistan...
- Publication number 20060060466
- Publication date Mar 23, 2006
- ANELVA CORPORATION
- Toru Kitada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Film forming apparatus
- Publication number 20050115830
- Publication date Jun 2, 2005
- ANELVA CORPORATION
- Shinji Furukawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus for manufacturing magnetic recording disk, and in-line ty...
- Publication number 20050103271
- Publication date May 19, 2005
- Naoki Watanabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus for manufacturing magnetic recording disk, and in-line ty...
- Publication number 20030200927
- Publication date Oct 30, 2003
- Naoki Watanabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
System for depositing a film
- Publication number 20030062260
- Publication date Apr 3, 2003
- ANELVA CORPORATION
- Shinji Furukawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Shinji FURUKAWA

Person

Patents Grantslast 30 patents

Hard mask and hard mask forming method

Film-forming device

Method of forming later insulating films for MTJ

Substrate processing apparatus

Method for forming copper film

Method and processing apparatus for performing pre-treatment to for...

Substrate processing apparatus

Vacuum-processing apparatus, vacuum-processing method, and storage...

Dual-target sputter deposition with controlled phase difference bet...

Film forming apparatus and film forming method

Method of supplying cobalt to recess

Film forming apparatus

Film forming apparatus

Apparatus for manufacturing magnetic recording disk, and in-line ty...

Film forming apparatus

Apparatus for manufacturing magnetic recording disk, and in-line ty...

Manufacturing apparatus of magnetoresistance elements

Film forming apparatus

System for depositing a film

Multilayer film deposition apparatus, and method and apparatus for...

Method for manufacturing a magnetic recording disk

Patents Applicationslast 30 patents

FILM FORMING APPARATUS

HARD MASK AND HARD MASK FORMING METHOD

HARD MASK AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD

FILM-FORMING DEVICE

SUBSTRATE PROCESSING APPARATUS

Method of Forming Insulating Film

METHOD FOR FORMING COPPER FILM

METHOD AND PROCESSING APPARATUS FOR PERFORMING PRE-TREATMENT TO FOR...

Method for Forming Perpendicular Magnetization Type Magnetic Tunnel...

PROCESSING APPARATUS

FILM FORMING APPARATUS AND FILM FORMING METHOD

Method of Supplying Cobalt to Recess

SUBSTRATE PROCESSING APPARATUS

Vacuum-Processing Apparatus, Vacuum-Processing Method, and Storage...

FILM FORMING APPARATUS

DUAL-TARGET SPUTTER DEPOSITION WITH CONTROLLED PHASE DIFFERENCE BET...

FILM FORMING APPARATUS

FILM FORMING APPARATUS

Apparatus for Manufacturing Magnetic Recording Disk, and In-Line Ty...

MANUFACTURING METHOD AND MANUFACTURING APPARATUS OF MAGNETORESISTAN...

Apparatus for Manufacturing Magnetic Recording Disk, and In-Line Ty...

Apparatus for Manufacturing Magnetic Recording Disk, and In-Line Ty...

Apparatus for Manufacturing Magnetic Recording Disk, and In-Line Ty...

FILM FORMING APPARATUS

Apparatus for Manufacturing Magnetic Recording Disk, and In-Line Ty...

Manufacturing Method And Manufacturing Apparatus Of Magnetoresistan...

Film forming apparatus

Apparatus for manufacturing magnetic recording disk, and in-line ty...

Apparatus for manufacturing magnetic recording disk, and in-line ty...

System for depositing a film