Shinji Hamamoto

Follow

Person

Salem, MA, US

People

Patents Applicationslast 30 patents

Information Patent Application
Method and system for substrate temperature profile control
- Publication number 20060027169
- Publication date Feb 9, 2006
- TOKYO ELECTRON LIMITED
- Yuji Tsukamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...