Shinji Higashitsutsumi

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing method and plasma processing apparatus
- Patent number 11,251,052
- Issue date Feb 15, 2022
- Tokyo Electron Limited
- Naotsugu Hoshi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma etching method
- Patent number 9,570,312
- Issue date Feb 14, 2017
- Tokyo Electron Limited
- Ryohei Takeda
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20190006188
- Publication date Jan 3, 2019
- TOKYO ELECTRON LIMITED
- Naotsugu HOSHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PLASMA ETCHING METHOD
- Publication number 20150099366
- Publication date Apr 9, 2015
- TOKYO ELECTRON LIMITED
- Ryohei Takeda
- H01 - BASIC ELECTRIC ELEMENTS