Membership
Tour
Register
Log in
Shinji HIMORI
Follow
Person
Kurokawa-gun, JP
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Plasma processing method and plasma processing apparatus
Patent number
11,764,034
Issue date
Sep 19, 2023
Tokyo Electron Limited
Chishio Koshimizu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus
Patent number
11,450,515
Issue date
Sep 20, 2022
Tokyo Electron Limited
Kazuya Nagaseki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing method and plasma processing apparatus
Patent number
11,387,077
Issue date
Jul 12, 2022
Tokyo Electron Limited
Shinji Kubota
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma etching method and plasma etching apparatus
Patent number
11,170,979
Issue date
Nov 9, 2021
Tokyo Electron Limited
Koichi Nagami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus
Patent number
11,133,157
Issue date
Sep 28, 2021
Tokyo Electron Limited
Akihiro Yokota
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Power feed member and substrate processing apparatus
Patent number
10,943,766
Issue date
Mar 9, 2021
Tokyo Electron Limited
Shunichi Ito
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus
Patent number
10,825,663
Issue date
Nov 3, 2020
Tokyo Electron Limited
Kazuya Nagaseki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor manufacturing device and processing method
Patent number
10,699,935
Issue date
Jun 30, 2020
TOKO ELECTRON LIMITED
Shinji Himori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method
Patent number
10,651,012
Issue date
May 12, 2020
Tokyo Electron Limited
Akihiro Yokota
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processing method and plasma processing apparatus
Patent number
10,553,407
Issue date
Feb 4, 2020
Tokyo Electron Limited
Koichi Nagami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
10,388,544
Issue date
Aug 20, 2019
Kabushiki Kaisha Toshiba
Akio Ui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus
Patent number
10,297,428
Issue date
May 21, 2019
Tokyo Electron Limited
Akihiro Yokota
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Electrode for plasma processing apparatus, plasma processing appara...
Patent number
10,290,468
Issue date
May 14, 2019
Tokyo Electron Limited
Masanobu Honda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Transfer apparatus and plasma processing system
Patent number
10,147,633
Issue date
Dec 4, 2018
Tokyo Electron Limited
Shinji Himori
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information
Patent Grant
Connection control method
Patent number
10,032,611
Issue date
Jul 24, 2018
Tokyo Electron Limited
Shinji Himori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma etching method
Patent number
9,978,566
Issue date
May 22, 2018
Tokyo Electron Limited
Akihiro Yokota
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor manufacturing device and processing method
Patent number
9,859,146
Issue date
Jan 2, 2018
Tokyo Electron Limited
Shinji Himori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate processing method usin...
Patent number
9,564,287
Issue date
Feb 7, 2017
Tokyo Electron Limited
Takeshi Ohse
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Capacitive coupling plasma processing apparatus
Patent number
9,412,562
Issue date
Aug 9, 2016
Tokyo Electron Limited
Shinji Himori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus
Patent number
9,390,943
Issue date
Jul 12, 2016
Tokyo Electron Limited
Kazuya Nagaseki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
9,275,836
Issue date
Mar 1, 2016
Tokyo Electron Limited
Shinji Himori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus
Patent number
9,245,776
Issue date
Jan 26, 2016
Tokyo Electron Limited
Shinji Himori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and electrode for same
Patent number
9,202,675
Issue date
Dec 1, 2015
Tokyo Electron Limited
Shinji Himori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Capacitive coupling plasma processing apparatus
Patent number
9,038,566
Issue date
May 26, 2015
Tokyo Electron Limited
Shinji Himori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching method of multilayer film
Patent number
8,895,454
Issue date
Nov 25, 2014
Tokyo Electron Limited
Shinji Himori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and electrode for same
Patent number
8,888,951
Issue date
Nov 18, 2014
Tokyo Electron Limited
Shinji Himori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate plasma processing apparatus and plasma processing method
Patent number
8,821,684
Issue date
Sep 2, 2014
Kabushiki Kaisha Toshiba
Akio Ui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Table for use in plasma processing system and plasma processing system
Patent number
8,741,098
Issue date
Jun 3, 2014
Tokyo Electron Limited
Akira Koshiishi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus, plasma processing method and storage m...
Patent number
8,703,002
Issue date
Apr 22, 2014
Tokyo Electron Limited
Tatsuo Matsudo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus
Patent number
8,651,049
Issue date
Feb 18, 2014
Tokyo Electron Limited
Tatsuo Matsudo
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20240213000
Publication date
Jun 27, 2024
TOKYO ELECTRON LIMITED
Kazuya NAGASEKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20240194459
Publication date
Jun 13, 2024
TOKYO ELECTRON LIMITED
Kazuya NAGASEKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA MONITORING SYSTEM, PLASMA MONITORING METHOD, AND MONITORING...
Publication number
20240096608
Publication date
Mar 21, 2024
TOKYO ELECTRON LIMITED
Satoru TERUUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PARTICLE MONITORING SYSTEM, PARTICLE MONITORING METHOD, AND MONITOR...
Publication number
20240068921
Publication date
Feb 29, 2024
TOKYO ELECTRON LIMITED
Satoru TERUUCHI
G01 - MEASURING TESTING
Information
Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20240006154
Publication date
Jan 4, 2024
TOKYO ELECTRON LIMITED
Chishio KOSHIMIZU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20220301825
Publication date
Sep 22, 2022
TOKYO ELECTRON LIMITED
Shinji KUBOTA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20220028665
Publication date
Jan 27, 2022
TOKYO ELECTRON LIMITED
Koichi Nagami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20210159049
Publication date
May 27, 2021
TOKYO ELECTRON LIMITED
Shinji KUBOTA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20210013015
Publication date
Jan 14, 2021
TOKYO ELECTRON LIMITED
Kazuya NAGASEKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20200381215
Publication date
Dec 3, 2020
TOKYO ELECTRON LIMITED
Chishio KOSHIMIZU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20200312623
Publication date
Oct 1, 2020
TOKYO ELECTRON LIMITED
Kazuki MOYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20200144028
Publication date
May 7, 2020
TOKYO ELECTRON LIMITED
Koichi NAGAMI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA ETCHING METHOD AND PLASMA ETCHING APPARATUS
Publication number
20200126770
Publication date
Apr 23, 2020
TOKYO ELECTRON LIMITED
Koichi Nagami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20190333741
Publication date
Oct 31, 2019
TOKYO ELECTRON LIMITED
Koichi NAGAMI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA SPRAYING APPARATUS AND SPRAYING CONTROL METHOD
Publication number
20190256962
Publication date
Aug 22, 2019
Tokyo Electron Limited
Yoshiyuki Kobayashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20190244794
Publication date
Aug 8, 2019
TOKYO ELECTRON LIMITED
Akihiro YOKOTA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20190164726
Publication date
May 30, 2019
TOKYO ELECTRON LIMITED
Gen TAMAMUSHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20190057845
Publication date
Feb 21, 2019
TOKYO ELECTRON LIMITED
Koichi Nagami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
POWER FEED MEMBER AND SUBSTRATE PROCESSING APPARATUS
Publication number
20180374679
Publication date
Dec 27, 2018
TOKYO ELECTRON LIMITED
Shunichi Ito
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GAS EXHAUST PLATE AND PLASMA PROCESSING APPARATUS
Publication number
20180374720
Publication date
Dec 27, 2018
TOKYO ELECTRON LIMITED
Shinji Himori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20180174806
Publication date
Jun 21, 2018
TOKYO ELECTRON LIMITED
Kazuya NAGASEKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR MANUFACTURING DEVICE AND PROCESSING METHOD
Publication number
20180114717
Publication date
Apr 26, 2018
TOKYO ELECTRON LIMITED
Shinji Himori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD
Publication number
20170162367
Publication date
Jun 8, 2017
TOKYO ELECTRON LIMITED
Akihiro YOKOTA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONNECTION CONTROL METHOD
Publication number
20170110296
Publication date
Apr 20, 2017
TOKYO ELECTRON LIMITED
Shinji Himori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA ETCHING METHOD
Publication number
20170103877
Publication date
Apr 13, 2017
TOKYO ELECTRON LIMITED
Akihiro YOKOTA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20150332898
Publication date
Nov 19, 2015
TOKYO ELECTRON LIMITED
Akihiro YOKOTA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CAPACITIVE COUPLING PLASMA PROCESSING APPARATUS
Publication number
20150221478
Publication date
Aug 6, 2015
TOKYO ELECTRON LIMITED
Shinji HIMORI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20150162223
Publication date
Jun 11, 2015
Kabushiki Kaisha Toshiba
Akio UI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD OF MULTILAYER FILM
Publication number
20150072534
Publication date
Mar 12, 2015
TOKYO ELECTRON LIMITED
Shinji Himori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20140346040
Publication date
Nov 27, 2014
Akihiro Yokota
H01 - BASIC ELECTRIC ELEMENTS