Shinji Ide

Person

Hyogo-Ken, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Film forming method for dielectric film
- Patent number 7,867,922
- Issue date Jan 11, 2011
- Tokyo Electron Limited
- Shinji Ide
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of cleaning semiconductor substrate conductive layer surface
- Patent number 7,713,864
- Issue date May 11, 2010
- Tokyo Electron Limited
- Masaru Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fabrication of low dielectric constant insulating film
- Patent number 7,645,481
- Issue date Jan 12, 2010
- Tokyo Electron Limited
- Masaru Sasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process and apparatus for forming oxide film, and electronic device...
- Patent number 7,632,758
- Issue date Dec 15, 2009
- Tokyo Electron Limited
- Junichi Kitagawa
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
FABRICATION OF LOW DIELECTRIC CONSTANT INSULATING FILM
- Publication number 20100132613
- Publication date Jun 3, 2010
- TOKYO ELECTRON LIMITED
- Masaru SASAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Process And Apparatus For Forming Oxide Film, And Electronic Device...
- Publication number 20100048033
- Publication date Feb 25, 2010
- TOKYO ELECTRON LIMITED
- Junichi Kitagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Film Forming Method for Dielectric Film
- Publication number 20090152686
- Publication date Jun 18, 2009
- Tokyo Electron Limited
- Shinji Ide
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD OF POROUS FILM AND COMPUTER-READABLE RECORDING...
- Publication number 20090053895
- Publication date Feb 26, 2009
- TOKYO ELECTRON LIMITED
- Yasuhiro OSHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20070286967
- Publication date Dec 13, 2007
- TOKYO ELECTRON LIMITED
- Shinji Ide
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Process and apparatus for forming oxide film, and electronic device...
- Publication number 20070128880
- Publication date Jun 7, 2007
- TOKYO ELECTRON LIMITED
- Junichi Kitagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of cleaning semiconductor substrate conductive layer surface
- Publication number 20070111528
- Publication date May 17, 2007
- TOKYO ELECTON LIMITED
- Masaru Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Fabrication of low dielectric constant insulating film
- Publication number 20070098890
- Publication date May 3, 2007
- Masaru Sasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Forming method of low dielectric constant insulating film of semico...
- Publication number 20060154492
- Publication date Jul 13, 2006
- TOKYO ELECTRON LIMITED
- Shinji Ide
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Process for forming oxide film, apparatus for forming oxide film an...
- Publication number 20050136610
- Publication date Jun 23, 2005
- TOKYO ELECTRON LIMITED
- Junichi Kitagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Process and apparatus for forming oxide film, and electronic device...
- Publication number 20050005844
- Publication date Jan 13, 2005
- TOKYO ELECTRON LIMITED
- Junichi Kitagawa
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Film forming method for dielectric film

Method of cleaning semiconductor substrate conductive layer surface

Fabrication of low dielectric constant insulating film

Process and apparatus for forming oxide film, and electronic device...

Patents Applicationslast 30 patents

FABRICATION OF LOW DIELECTRIC CONSTANT INSULATING FILM

Process And Apparatus For Forming Oxide Film, And Electronic Device...

Film Forming Method for Dielectric Film

FILM FORMING METHOD OF POROUS FILM AND COMPUTER-READABLE RECORDING...

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

Process and apparatus for forming oxide film, and electronic device...

Method of cleaning semiconductor substrate conductive layer surface

Fabrication of low dielectric constant insulating film

Forming method of low dielectric constant insulating film of semico...

Process for forming oxide film, apparatus for forming oxide film an...

Process and apparatus for forming oxide film, and electronic device...