Shinji Irie

Person

Tokyo-To, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Non-plasma etch of titanium-containing material layers with tunable...
- Patent number 11,322,350
- Issue date May 3, 2022
- Tokyo Electron Limited
- Daisuke Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of etching silicon-containing film, computer-readable storag...
- Patent number 11,189,498
- Issue date Nov 30, 2021
- Tokyo Electron Limited
- Takehiko Orii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method and etching apparatus
- Patent number 10,665,470
- Issue date May 26, 2020
- Tokyo Electron Limited
- Yasuo Asada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Boat for heat treatment and vertical heat treatment equipment
- Patent number 6,966,771
- Issue date Nov 22, 2005
- Tokyo Electron Limited
- Shinji Irie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SELECTIVE GAS PHASE ETCH OF SILICON GERMANIUM ALLOYS
- Publication number 20240128088
- Publication date Apr 18, 2024
- TOKYO ELECTRON LIMITED
- Toshiki KANAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD, METHOD OF REMOVING ETCHING RESIDUE, AND STORAGE MEDIUM
- Publication number 20210358761
- Publication date Nov 18, 2021
- Tokyo Electron Limited
- Nobuhiro TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NON-PLASMA ETCH OF TITANIUM-CONTAINING MATERIAL LAYERS WITH TUNABLE...
- Publication number 20210057213
- Publication date Feb 25, 2021
- TOKYO ELECTRON LIMITED
- Daisuke Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Etching Method and Etching Apparatus
- Publication number 20200234974
- Publication date Jul 23, 2020
- TOKYO ELECTRON LIMITED
- Yasuo ASADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF ETCHING SILICON-CONTAINING FILM, COMPUTER-READABLE STORAG...
- Publication number 20190355589
- Publication date Nov 21, 2019
- TOKYO ELECTRON LIMITED
- Takehiko ORII
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD AND ETCHING APPARATUS
- Publication number 20190198349
- Publication date Jun 27, 2019
- TOKYO ELECTRON LIMITED
- Yasuo ASADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Boat for heat treatment and vertical heat treatment equipment
- Publication number 20050042568
- Publication date Feb 24, 2005
- Shinji Irie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Boat for heat treatment and vertical heat treatment apparatus
- Publication number 20030157453
- Publication date Aug 21, 2003
- Shinji Irie
- C30 - CRYSTAL GROWTH

Shinji Irie

Person

Patents Grantslast 30 patents

Non-plasma etch of titanium-containing material layers with tunable...

Method of etching silicon-containing film, computer-readable storag...

Etching method and etching apparatus

Boat for heat treatment and vertical heat treatment equipment

Patents Applicationslast 30 patents

SELECTIVE GAS PHASE ETCH OF SILICON GERMANIUM ALLOYS

ETCHING METHOD, METHOD OF REMOVING ETCHING RESIDUE, AND STORAGE MEDIUM

NON-PLASMA ETCH OF TITANIUM-CONTAINING MATERIAL LAYERS WITH TUNABLE...

Etching Method and Etching Apparatus

METHOD OF ETCHING SILICON-CONTAINING FILM, COMPUTER-READABLE STORAG...

ETCHING METHOD AND ETCHING APPARATUS

Boat for heat treatment and vertical heat treatment equipment

Boat for heat treatment and vertical heat treatment apparatus