Shinji KAJITA

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus for cleaning substrate and substrate cleaning method
- Patent number 11,094,548
- Issue date Aug 17, 2021
- Ebara Corporation
- Shinji Kajita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate drying apparatus, substrate drying method and control pro...
- Patent number 10,008,380
- Issue date Jun 26, 2018
- Ebara Corporation
- Tomoatsu Ishibashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate drying apparatus, substrate drying method and control pro...
- Patent number 8,769,842
- Issue date Jul 8, 2014
- Ebara Corporation
- Tomoatsu Ishibashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 8,226,771
- Issue date Jul 24, 2012
- Ebara Corporation
- Fumitoshi Oikawa
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus for and method of processing substrate
- Patent number 7,578,887
- Issue date Aug 25, 2009
- Ebara Corporation
- Shinji Kajita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for forming thin film of metal
- Patent number 6,972,256
- Issue date Dec 6, 2005
- Ebara Corporation
- Akira Fukunaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TREATMENT APPARATUS AND METHOD FOR TREATING SUBSTRATE
- Publication number 20240286245
- Publication date Aug 29, 2024
- EBARA CORPORATION
- Shinji KAJITA
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD
- Publication number 20190164769
- Publication date May 30, 2019
- EBARA CORPORATION
- Shinji KAJITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE DRYING APPARATUS, SUBSTRATE DRYING METHOD AND CONTROL PRO...
- Publication number 20140259728
- Publication date Sep 18, 2014
- EBARA CORPORATION
- Tomoatsu ISHIBASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE DRYING APPARATUS, SUBSTRATE DRYING METHOD AND CONTROL PRO...
- Publication number 20130219740
- Publication date Aug 29, 2013
- EBARA CORPORATION
- Tomoatsu ISHIBASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING METHOD AND CLEANING APPARATUS
- Publication number 20120160267
- Publication date Jun 28, 2012
- Masako KODERA
- B08 - CLEANING
Information Patent Application
SUBSTRATE DRYING APPARATUS, SUBSTRATE DRYING METHOD AND CONTROL PRO...
- Publication number 20110289795
- Publication date Dec 1, 2011
- Tomoatsu ISHIBASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus and Substrate Processing Method
- Publication number 20090301518
- Publication date Dec 10, 2009
- Fumitoshi Oikawa
- B08 - CLEANING
Information Patent Application
Substrate Processing Apparatus and Method
- Publication number 20080110861
- Publication date May 15, 2008
- Shinji Kajita
- B08 - CLEANING
Information Patent Application
Apparatus for and method of processing substrate
- Publication number 20040211959
- Publication date Oct 28, 2004
- Shinji Kajita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and method
- Publication number 20030092264
- Publication date May 15, 2003
- Shinji Kajita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Shinji KAJITA

Person

Patents Grantslast 30 patents

Apparatus for cleaning substrate and substrate cleaning method

Substrate drying apparatus, substrate drying method and control pro...

Substrate drying apparatus, substrate drying method and control pro...

Substrate processing apparatus and substrate processing method

Apparatus for and method of processing substrate

Method and apparatus for forming thin film of metal

Patents Applicationslast 30 patents

SUBSTRATE TREATMENT APPARATUS AND METHOD FOR TREATING SUBSTRATE

SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD

SUBSTRATE DRYING APPARATUS, SUBSTRATE DRYING METHOD AND CONTROL PRO...

SUBSTRATE DRYING APPARATUS, SUBSTRATE DRYING METHOD AND CONTROL PRO...

CLEANING METHOD AND CLEANING APPARATUS

SUBSTRATE DRYING APPARATUS, SUBSTRATE DRYING METHOD AND CONTROL PRO...

Substrate Processing Apparatus and Substrate Processing Method

Substrate Processing Apparatus and Method

Apparatus for and method of processing substrate

Substrate processing apparatus and method