Shinji Kawada

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Hsin-chu City, TW

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Patents Grantslast 30 patents

Information Patent Grant
Plasma treatment method and plasma treatment device
- Patent number 9,165,764
- Issue date Oct 20, 2015
- Tokyo Electron Limited
- Masaki Inoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming dummy gate
- Patent number 8,946,030
- Issue date Feb 3, 2015
- Tokyo Electron Limited
- Motoki Noro
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA TREATMENT METHOD AND PLASMA TREATMENT DEVICE
- Publication number 20140329390
- Publication date Nov 6, 2014
- TOKYO ELECTRON LIMITED
- Masaki Inoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING DUMMY GATE
- Publication number 20140170842
- Publication date Jun 19, 2014
- TOKYO ELECTRON LIMITED
- Motoki NORO
- H01 - BASIC ELECTRIC ELEMENTS