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Shinji Kawada
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Miyagi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Plasma processing method and plasma processing apparatus
Patent number
10,923,328
Issue date
Feb 16, 2021
Tokyo Electron Limited
Takehiro Tanikawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Microwave automatic matcher and plasma processing apparatus
Patent number
10,109,463
Issue date
Oct 23, 2018
Tokyo Electron Limited
Kazushi Kaneko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing a semiconductor device
Patent number
8,329,591
Issue date
Dec 11, 2012
Oki Semiconductor Co., Ltd.
Shinji Kawada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of measuring resistivity of sidewall of contact hole
Patent number
7,923,268
Issue date
Apr 12, 2011
Oki Semiconductor Co., Ltd.
Youichi Yatagai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ultraviolet light monitoring system
Patent number
7,732,783
Issue date
Jun 8, 2010
Oki Semiconductor Co., Ltd.
Jun Hashimoto
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20180374682
Publication date
Dec 27, 2018
TOKYO ELECTRON LIMITED
Takehiro TANIKAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MICROWAVE AUTOMATIC MATCHER AND PLASMA PROCESSING APPARATUS
Publication number
20160268101
Publication date
Sep 15, 2016
TOKYO ELECTRON LIMITED
Kazushi KANEKO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MEASURING RESISTIVITY OF SIDEWALL OF CONTACT HOLE
Publication number
20100068836
Publication date
Mar 18, 2010
Youichi Yatagai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Ultraviolet light monitoring system
Publication number
20090058432
Publication date
Mar 5, 2009
Oki Electric Industry Co., Ltd.
Jun Hashimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
Publication number
20080268648
Publication date
Oct 30, 2008
Shinji Kawada
H01 - BASIC ELECTRIC ELEMENTS