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Vacuum pump
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Patent number 9,453,510
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Issue date Sep 27, 2016
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Edwards Japan Limited
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Shinji Kawanishi
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F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
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Stator vane of turbo molecular pump
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Patent number 7,824,153
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Issue date Nov 2, 2010
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BOC Edwards Japan Limited
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Takeshi Akimoto
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F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
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Vacuum pump
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Patent number 6,890,145
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Issue date May 10, 2005
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BOC Edwards Technologies Limited
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Masayoshi Takamine
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F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
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Vacuum pump
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Patent number 6,752,588
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Issue date Jun 22, 2004
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BOC Edwards Technologies Limited
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Shinji Kawanishi
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F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...