Shinji Kawasaki

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Yamanashi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Abnormality detection system and control board
- Patent number 11,873,560
- Issue date Jan 16, 2024
- Tokyo Electron Limited
- Katsuhito Hirose
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,732,357
- Issue date Aug 22, 2023
- Tokyo Electron Limited
- Tsuyoshi Takahashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200392622
- Publication date Dec 17, 2020
- TOKYO ELECTRON LIMITED
- Tsuyoshi TAKAHASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ABNORMALITY DETECTION SYSTEM AND CONTROL BOARD
- Publication number 20200299841
- Publication date Sep 24, 2020
- TOKYO ELECTRON LIMITED
- Katsuhito Hirose
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...