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Method for forming resist pattern
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Patent number 6,858,375
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Issue date Feb 22, 2005
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Sharp Kabushiki Kaisha
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Shinji Kobayashi
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Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
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Method of producing chromium mask
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Patent number 6,544,894
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Issue date Apr 8, 2003
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Sharp Kabushiki Kaisha
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Shinji Kobayashi
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Method for fabricating mask
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Patent number 6,503,667
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Issue date Jan 7, 2003
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Sharp Kabushiki Kaisha
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Shinji Kobayashi
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Method for producing a photomask
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Patent number 5,851,702
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Issue date Dec 22, 1998
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Sharp Kabushiki Kaisha
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Kunio Watanabe
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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