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Shinji Kohari

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  • Kanagawa, JP
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Patents Applicationslast 30 patents

  • Information Patent Application

    Film Forming Method
    • Publication number 20220056571
    • Publication date Feb 24, 2022
    • Ulvac, Inc.
    • Kengo Tsutsumi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20200243310
    • Publication date Jul 30, 2020
    • ULVAC, Inc.
    • Tsuyoshi KAGAMI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD OF FORMING CARBON FILM
    • Publication number 20180305807
    • Publication date Oct 25, 2018
    • Ulvac, Inc.
    • Shinji Kohari
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SPUTTERING APPARATUS
    • Publication number 20180057928
    • Publication date Mar 1, 2018
    • Ulvac, Inc.
    • Hiroki Yamamoto
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    INSULATOR TARGET
    • Publication number 20170178875
    • Publication date Jun 22, 2017
    • Ulvac, Inc.
    • Shinji Kohari
    • H01 - BASIC ELECTRIC ELEMENTS