Shinji KOJIMA

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Nirasaki City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method for pre-heating probe card
- Patent number 9,519,022
- Issue date Dec 13, 2016
- Tokyo Electron Limited
- Hiroshi Yamada
- G01 - MEASURING TESTING
Information Patent Grant
Wafer inspection apparatus
- Patent number 9,201,115
- Issue date Dec 1, 2015
- Tokyo Electron Limited
- Hiroshi Yamada
- G01 - MEASURING TESTING
Information Patent Grant
Method and program for operating test apparatus
- Patent number 8,319,514
- Issue date Nov 27, 2012
- Tokyo Electron Limited
- Satoshi Sano
- G01 - MEASURING TESTING
Information Patent Grant
Each inspection units of a probe apparatus is provided with an imag...
- Patent number 7,701,236
- Issue date Apr 20, 2010
- Tokyo Electron Limited
- Shuji Akiyama
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Method for Pre-Heating Probe Card
- Publication number 20150219716
- Publication date Aug 6, 2015
- TOKYO ELECTRON LIMITED
- Hiroshi YAMADA
- G01 - MEASURING TESTING
Information Patent Application
WAFER INSPECTION APPARATUS AND METHOD FOR PRE-HEATING PROBE CARD
- Publication number 20120062259
- Publication date Mar 15, 2012
- TOKYO ELECTRON LIMITED
- Hiroshi YAMADA
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND PROGRAM FOR OPERATING TEST APPARATUS
- Publication number 20110050276
- Publication date Mar 3, 2011
- TOKYO ELECTRON LIMITED
- Satoshi SANO
- G01 - MEASURING TESTING
Information Patent Application
PROBE APPARATUS
- Publication number 20080290886
- Publication date Nov 27, 2008
- TOKYO ELECTRON LIMITED
- Shuji Akiyama
- G01 - MEASURING TESTING