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Shinji Komoto

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  • Amagasaki-shi, JP
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20150159269
    • Publication date Jun 11, 2015
    • TOKYO ELECTRON LIMITED
    • Toshihisa NOZAWA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20150159270
    • Publication date Jun 11, 2015
    • TOKYO ELECTRON LIMITED
    • Toshihisa NOZAWA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD, METHOD FOR C...
    • Publication number 20120111427
    • Publication date May 10, 2012
    • TOKYO ELECTRON LIMITED
    • Toshihisa Nozawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD OF CLEANING PLASMA-TREATING APPARATUS, PLASMA-TREATING APPAR...
    • Publication number 20100175713
    • Publication date Jul 15, 2010
    • TOKYO ELECTRON LIMITED
    • Noriaki Fukiage
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    GATE VALVE AND SEMICONDUCTOR MANUFACTURING APPARATUS
    • Publication number 20090230342
    • Publication date Sep 17, 2009
    • TOKYO ELECTRON LIMITED
    • Shinji KOMOTO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20090194238
    • Publication date Aug 6, 2009
    • TOKYO ELECTRON LIMITED
    • Kiyotaka Ishibashi
    • H01 - BASIC ELECTRIC ELEMENTS