Shinji Maekawa

Person

Nirasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Radical deactivation component, plasma processing apparatus using t...
- Patent number 11,380,522
- Issue date Jul 5, 2022
- Tokyo Electron Limited
- Koji Yamagishi
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Substrate mounting mechanism, and substrate processing apparatus
- Patent number 9,202,728
- Issue date Dec 1, 2015
- Tokyo Electron Limited
- Masamichi Hara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
RADICAL DEACTIVATION COMPONENT, PLASMA PROCESSING APPARATUS USING T...
- Publication number 20190362939
- Publication date Nov 28, 2019
- TOKYO ELECTRON LIMITED
- Koji YAMAGISHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE MOUNTING MECHANISM, AND SUBSTRATE PROCESSING
- Publication number 20120199573
- Publication date Aug 9, 2012
- TOKYO ELECTRON LIMITED
- Masamichi HARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RAW MATERIAL GAS SUPPLY SYSTEM AND FILM FORMING APPARATUS
- Publication number 20100236480
- Publication date Sep 23, 2010
- TOKYO ELECTRON LIMITED
- Masamichi Hara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE MOUNTING MECHANISM AND SUBSTRATE PROCESSING APPARATUS HAV...
- Publication number 20100212594
- Publication date Aug 26, 2010
- TOKYO ELECTRON LIMITED
- Masamichi HARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE MOUNTING MECHANISM, SUBSTRATE PROCESSING APPARATUS, METHO...
- Publication number 20100210115
- Publication date Aug 19, 2010
- TOKYO ELECTRON LIMITED
- Masamichi HARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS SUPPLY METHOD AND GAS SUPPLY DEVICE
- Publication number 20100062158
- Publication date Mar 11, 2010
- TOKYO ELECTRON LIMITED
- Masamichi Hara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Shinji Maekawa

Person

Patents Grantslast 30 patents

Radical deactivation component, plasma processing apparatus using t...

Substrate mounting mechanism, and substrate processing apparatus

Patents Applicationslast 30 patents

RADICAL DEACTIVATION COMPONENT, PLASMA PROCESSING APPARATUS USING T...

SUBSTRATE MOUNTING MECHANISM, AND SUBSTRATE PROCESSING

RAW MATERIAL GAS SUPPLY SYSTEM AND FILM FORMING APPARATUS

SUBSTRATE MOUNTING MECHANISM AND SUBSTRATE PROCESSING APPARATUS HAV...

SUBSTRATE MOUNTING MECHANISM, SUBSTRATE PROCESSING APPARATUS, METHO...

GAS SUPPLY METHOD AND GAS SUPPLY DEVICE