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Shinji Matsubayashi

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  • Amagasaki-shi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Vacuum processing apparatus
    • Patent number 8,522,958
    • Issue date Sep 3, 2013
    • Tokyo Electron Limited
    • Yasuhiro Tobe
    • B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
  • Information Patent Grant

    Substrate processing apparatus
    • Patent number 8,337,621
    • Issue date Dec 25, 2012
    • Tokyo Electron Limited
    • Yasuhiro Tobe
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    SUBSTRATE PROCESSING SYSTEM
    • Publication number 20110240223
    • Publication date Oct 6, 2011
    • Tokyo Electron Limited
    • Shinji Matsubayashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    VACUUM PROCESSING APPARATUS
    • Publication number 20110076119
    • Publication date Mar 31, 2011
    • Yasuhiro Tobe
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20100043712
    • Publication date Feb 25, 2010
    • TOKYO ELECTRON LIMITED
    • Yasuhiro Tobe
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DEPOSITION APPARATUS, DEPOSITION SYSTEM AND DEPOSITION METHOD
    • Publication number 20090246941
    • Publication date Oct 1, 2009
    • TOKYO ELECTRON LIMITED
    • Shinji Matsubayashi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...