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Shinji MIYAWAKI
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Kyoto-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Light-irradiation thermal treatment apparatus
Patent number
11,881,420
Issue date
Jan 23, 2024
SCREEN Holdings Co., Ltd.
Takahiro Yamada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Light-irradiation thermal treatment apparatus
Patent number
10,950,472
Issue date
Mar 16, 2021
SCREEN Holdings Co., Ltd.
Takahiro Yamada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Light-irradiation heat treatment method and heat treatment apparatus
Patent number
10,580,667
Issue date
Mar 3, 2020
SCREEN Holdings Co., Ltd.
Takayuki Aoyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Heat treatment apparatus for heating substrate by irradiating subst...
Patent number
8,624,165
Issue date
Jan 7, 2014
Dainippon Screen Mfg. Co., Ltd.
Tatsufumi Kusuda
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
LIGHT-IRRADIATION THERMAL TREATMENT APPARATUS
Publication number
20210159099
Publication date
May 27, 2021
SCREEN Holdings Co., Ltd.
Takahiro YAMADA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LIGHT-IRRADIATION THERMAL TREATMENT APPARATUS
Publication number
20180076062
Publication date
Mar 15, 2018
SCREEN Holdings Co., Ltd.
Takahiro YAMADA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LIGHT-IRRADIATION HEAT TREATMENT METHOD AND HEAT TREATMENT APPARATUS
Publication number
20180005848
Publication date
Jan 4, 2018
SCREEN Holdings Co., Ltd.
TAKAYUKI AOYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HEAT TREATMENT APPARATUS FOR HEATING SUBSTRATE BY IRRADIATING SUBST...
Publication number
20120067864
Publication date
Mar 22, 2012
Tatsufumi KUSUDA
H01 - BASIC ELECTRIC ELEMENTS