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last 30 patents
Information
Patent Grant
Extreme ultraviolet light generation apparatus and electronic devic...
Patent number
11,272,608
Issue date
Mar 8, 2022
Gigaphoton Inc.
Atsushi Ueda
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Extreme ultraviolet light generation device and electronic device m...
Patent number
11,042,102
Issue date
Jun 22, 2021
Gigaphoton Inc.
Shinji Nagai
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Extreme ultraviolet light generation apparatus
Patent number
10,820,400
Issue date
Oct 27, 2020
Gigaphoton Inc.
Hiroaki Tomuro
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Extreme ultraviolet light generation apparatus
Patent number
10,764,986
Issue date
Sep 1, 2020
Gigaphoton Inc.
Shinji Nagai
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet light generation apparatus
Patent number
10,314,152
Issue date
Jun 4, 2019
Gigaphoton Inc.
Shinji Nagai
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet light generating device
Patent number
10,268,119
Issue date
Apr 23, 2019
Gigaphoton Inc.
Shinji Nagai
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet light generation device
Patent number
10,136,510
Issue date
Nov 20, 2018
Gigaphoton Inc.
Shinji Nagai
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet light generation apparatus and method of design...
Patent number
10,001,706
Issue date
Jun 19, 2018
Gigaphoton Inc.
Atsushi Ueda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Extreme ultraviolet light generation device
Patent number
9,872,372
Issue date
Jan 16, 2018
Gigaphoton Inc.
Atsushi Ueda
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Extreme ultraviolet light generation apparatus
Patent number
9,510,433
Issue date
Nov 29, 2016
Gigaphoton Inc.
Shinji Nagai
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Cleaning method for EUV light generation apparatus
Patent number
9,465,307
Issue date
Oct 11, 2016
Gigaphoton Inc.
Hakaru Mizoguchi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Extreme ultraviolet light source apparatus
Patent number
8,901,524
Issue date
Dec 2, 2014
Gigaphoton Inc.
Takeshi Asayama
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Chamber apparatus and extreme ultraviolet light generation system
Patent number
8,901,522
Issue date
Dec 2, 2014
Gigaphoton Inc.
Yoshifumi Ueno
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Polarization purity control device and gas laser apparatus provided...
Patent number
8,902,948
Issue date
Dec 2, 2014
Gigaphoton Inc.
Shinji Nagai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Polarization purity control device and gas laser apparatus provided...
Patent number
8,891,574
Issue date
Nov 18, 2014
Gigaphoton Inc.
Shinji Nagai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Chamber apparatus and extreme ultraviolet light generation system
Patent number
8,884,257
Issue date
Nov 11, 2014
Gigaphoton Inc.
Shinji Nagai
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet light generation apparatus
Patent number
8,872,142
Issue date
Oct 28, 2014
Gigaphoton Inc.
Shinji Nagai
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Gas discharge chamber
Patent number
8,855,167
Issue date
Oct 7, 2014
Gigaphoton Inc.
Shinji Nagai
G02 - OPTICS
Information
Patent Grant
Extreme ultraviolet light source apparatus
Patent number
8,841,641
Issue date
Sep 23, 2014
Gigaphoton Inc.
Kouji Kakizaki
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Chamber apparatus
Patent number
8,748,853
Issue date
Jun 10, 2014
Gigaphoton Inc.
Shinji Nagai
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet light generation apparatus
Patent number
8,629,417
Issue date
Jan 14, 2014
Gigaphoton Inc.
Shinji Nagai
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet light generation system
Patent number
8,624,208
Issue date
Jan 7, 2014
Gigaphoton Inc.
Shinji Nagai
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet light source apparatus
Patent number
8,586,954
Issue date
Nov 19, 2013
Gigaphoton Inc.
Takeshi Asayama
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet light source apparatus
Patent number
8,569,723
Issue date
Oct 29, 2013
Gigaphoton Inc.
Shinji Nagai
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet light source apparatus
Patent number
8,558,202
Issue date
Oct 15, 2013
Gigaphoton Inc.
Tatsuya Yanagida
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet light source apparatus
Patent number
8,530,869
Issue date
Sep 10, 2013
Gigaphoton Inc.
Shinji Nagai
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet light source apparatus
Patent number
8,530,870
Issue date
Sep 10, 2013
Gigaphoton Inc.
Kouji Kakizaki
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet light source apparatus
Patent number
8,513,630
Issue date
Aug 20, 2013
Gigaphoton Inc.
Yoshifumi Ueno
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet light source apparatus
Patent number
8,507,883
Issue date
Aug 13, 2013
Gigaphoton Inc.
Akira Endo
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Gas discharge chamber
Patent number
8,503,499
Issue date
Aug 6, 2013
Gigaphoton Inc.
Shinji Nagai
G02 - OPTICS
Patents Applications
last 30 patents
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVIC...
Publication number
20210235571
Publication date
Jul 29, 2021
Gigaphoton Inc.
Atsushi UEDA
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE AND ELECTRONIC DEVICE M...
Publication number
20200301285
Publication date
Sep 24, 2020
Gigaphoton Inc.
Shinji NAGAI
B82 - NANO-TECHNOLOGY
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
Publication number
20200077501
Publication date
Mar 5, 2020
Gigaphoton Inc.
Hiroaki TOMURO
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATING DEVICE
Publication number
20180224748
Publication date
Aug 9, 2018
Gigaphoton Inc.
Shinji NAGAI
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND METHOD OF DESIGN...
Publication number
20170315446
Publication date
Nov 2, 2017
Gigaphoton Inc.
Atsushi UEDA
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE
Publication number
20170238407
Publication date
Aug 17, 2017
Gigaphoton Inc.
Shinji NAGAI
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE
Publication number
20170094767
Publication date
Mar 30, 2017
Gigaphoton Inc.
Atsushi UEDA
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
Publication number
20170064800
Publication date
Mar 2, 2017
Gigaphoton Inc.
Shinji NAGAI
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
Publication number
20170055336
Publication date
Feb 23, 2017
Gigaphoton Inc.
Shinji NAGAI
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM AND EXTREME ULTRAVIOLET...
Publication number
20150296604
Publication date
Oct 15, 2015
Gigaphoton Inc.
Shinji NAGAI
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
Publication number
20150008345
Publication date
Jan 8, 2015
Gigaphoton Inc.
Shinji NAGAI
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
POLARIZATION PURITY CONTROL DEVICE AND GAS LASER APPARATUS PROVIDED...
Publication number
20140050239
Publication date
Feb 20, 2014
GIGAPHOTON INC.
Shinji NAGAI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS
Publication number
20140008554
Publication date
Jan 9, 2014
GIGAPHOTON INC.
Takeshi ASAYAMA
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
GAS DISCHARGE CHAMBER
Publication number
20130322483
Publication date
Dec 5, 2013
GIGAPHOTON INC.
Shinji NAGAI
G02 - OPTICS
Information
Patent Application
CLEANING METHOD FOR EUV LIGHT GENERATION APPARATUS
Publication number
20130319466
Publication date
Dec 5, 2013
Hakaru MIZOGUCHI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS
Publication number
20130256567
Publication date
Oct 3, 2013
GIGAPHOTON INC.
Kouji KAKIZAKI
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
EXCIMER LASER DEVICE
Publication number
20130223468
Publication date
Aug 29, 2013
Komatsu Ltd.
Shinji NAGAI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
Publication number
20130161540
Publication date
Jun 27, 2013
GIGAPHOTON INC.
Shinji NAGAI
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS, TARGET COLLECTION D...
Publication number
20130134326
Publication date
May 30, 2013
Takayuki Yabu
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
CHAMBER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
Publication number
20130126761
Publication date
May 23, 2013
GIGAPHOTON INC.
Shinji NAGAI
G02 - OPTICS
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
Publication number
20120267553
Publication date
Oct 25, 2012
Gigaphoton Inc.
Shinji NAGAI
G01 - MEASURING TESTING
Information
Patent Application
CHAMBER APPARATUS
Publication number
20120248343
Publication date
Oct 4, 2012
GIGAPHOTON INC.
Shinji NAGAI
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
Publication number
20120223257
Publication date
Sep 6, 2012
GIGAPHOTON, INC.
Shinji NAGAI
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS
Publication number
20120176036
Publication date
Jul 12, 2012
Gigaphoton Inc.
Takeshi ASAYAMA
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
POLARIZATION PURITY CONTROL DEVICE AND GAS LASER APPARATUS PROVIDED...
Publication number
20120177072
Publication date
Jul 12, 2012
GIGAPHOTON INC.
Shinji NAGAI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS
Publication number
20120119116
Publication date
May 17, 2012
GIGAPHOTON INC.
Kouji KAKIZAKI
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS
Publication number
20120091893
Publication date
Apr 19, 2012
Gigaphoton, Inc
Tatsuya YANAGIDA
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
CHAMBER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
Publication number
20110284775
Publication date
Nov 24, 2011
CIGAPHOTON INC.
Yoshifumi Ueno
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS
Publication number
20110266468
Publication date
Nov 3, 2011
Gigaphoton Inc.
Shinji NAGAI
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS
Publication number
20110266467
Publication date
Nov 3, 2011
Gigaphoton Inc.
Shinji NAGAI
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR