Shinji Nakaguma

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Fukuoka, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma generating apparatus with multiple microwave introducing means
- Patent number 6,109,208
- Issue date Aug 29, 2000
- Mitsubishi Denki Kabushiki Kaisha
- Masaaki Tsuchihashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetically enhanced microwave plasma generating apparatus
- Patent number 6,054,016
- Issue date Apr 25, 2000
- Mitsubishi Denki Kabushiki Kaisha
- Mutumi Tuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for the plasma treatment of semiconductor devices
- Patent number 5,210,055
- Issue date May 11, 1993
- Mitsubishi Denki Kabushiki Kaisha
- Shinji Nakaguma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...