Shinji OBAMA

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Kudamatsu, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 9,566,821
- Issue date Feb 14, 2017
- Hitachi High-Technologies Corporation
- Takamasa Ichino
- B44 - DECORATIVE ARTS
Information Patent Grant
Vacuum processing apparatus
- Patent number 8,731,706
- Issue date May 20, 2014
- Hitachi High-Technologies Corporation
- Shingo Kimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 8,329,054
- Issue date Dec 11, 2012
- Hitachi High-Technologies Corporation
- Takamasa Ichino
- B44 - DECORATIVE ARTS
Information Patent Grant
Plasma processing apparatus
- Patent number 8,186,300
- Issue date May 29, 2012
- Hitachi High-Technologies Corporation
- Takamasa Ichino
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20130075036
- Publication date Mar 28, 2013
- Hitachi High-Technologies Corporation
- Takamasa ICHINO
- B44 - DECORATIVE ARTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20120186747
- Publication date Jul 26, 2012
- Shinji OBAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20100163184
- Publication date Jul 1, 2010
- Hitachi High-Technologies Corporation
- Takamasa ICHINO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM PROCESSING APPARATUS
- Publication number 20100068009
- Publication date Mar 18, 2010
- Shingo Kimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20090321391
- Publication date Dec 31, 2009
- Hitachi High-Technologies Corporation
- Takamasa ICHINO
- B44 - DECORATIVE ARTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND CONTROL METHOD FOR PLASMA PROCESSIN...
- Publication number 20090283502
- Publication date Nov 19, 2009
- Hitachi High-Technologies Corporation
- Shinji OBAMA
- H01 - BASIC ELECTRIC ELEMENTS