Shinji Ohishi

Person

Oyama-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus performing examination utilizing photoacoustic effect, ex...
- Patent number 11,246,492
- Issue date Feb 15, 2022
- Canon Kabushiki Kaisha
- Shinji Ohishi
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Acoustic wave apparatus and control method thereof
- Patent number 11,058,357
- Issue date Jul 13, 2021
- Canon Kabushiki Kaisha
- Shinji Ohishi
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Drawing apparatus, method of manufacturing article, method of manuf...
- Patent number 8,729,493
- Issue date May 20, 2014
- Canon Kabushiki Kaisha
- Shinji Ohishi
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Drawing apparatus, and method of manufacturing article
- Patent number 8,686,374
- Issue date Apr 1, 2014
- Canon Kabushiki Kaisha
- Shinji Ohishi
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Drawing apparatus, method of manufacturing article, and information...
- Patent number 8,618,497
- Issue date Dec 31, 2013
- Canon Kabushiki Kaisha
- Shinji Ohishi
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Stage unit, exposure apparatus, and device manufacturing method
- Patent number 7,982,417
- Issue date Jul 19, 2011
- Canon Kabushiki Kaisha
- Shinji Ohishi
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Stage apparatus
- Patent number 7,635,930
- Issue date Dec 22, 2009
- Canon Kabushiki Kaisha
- Shinji Ohishi
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Stage device for positioning an object, in which a static pressure...
- Patent number 7,259,836
- Issue date Aug 21, 2007
- Canon Kabushiki Kaisha
- Shinji Ohishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment stage apparatus, exposure apparatus, and semiconductor de...
- Patent number 7,245,092
- Issue date Jul 17, 2007
- Canon Kabushiki Kaisha
- Shinji Ohishi
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Alignment stage apparatus
- Patent number 7,199,493
- Issue date Apr 3, 2007
- Canon Kabushiki Kaisha
- Shinji Ohishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage device for positioning an object, in which a static pressure...
- Patent number 7,088,429
- Issue date Aug 8, 2006
- Canon Kabushiki Kaisha
- Shinji Ohishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment stage apparatus
- Patent number 7,084,534
- Issue date Aug 1, 2006
- Canon Kabushiki Kaisha
- Shinji Ohishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage device for an exposure apparatus and semiconductor device man...
- Patent number 6,504,160
- Issue date Jan 7, 2003
- Canon Kabushiki Kaisha
- Hirohito Itoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage system and exposure apparatus with the same
- Patent number 6,408,045
- Issue date Jun 18, 2002
- Canon Kabushiki Kaisha
- Shin Matsui
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Stage device for an exposure apparatus and semiconductor device man...
- Patent number 6,072,183
- Issue date Jun 6, 2000
- Canon Kabushiki Kaisha
- Hirohito Itoh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage device and pattern transfer system using the same
- Patent number 5,684,856
- Issue date Nov 4, 1997
- Canon Kabushiki Kaisha
- Hirohito Itoh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Positioning table device including correction of energization elect...
- Patent number 5,666,038
- Issue date Sep 9, 1997
- Canon Kabushiki Kaisha
- Shinji Ohishi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Stage device for an exposure apparatus and semiconductor device man...
- Patent number 5,260,580
- Issue date Nov 9, 1993
- Canon Kabushiki Kaisha
- Hirohito Itoh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device for positioning control
- Patent number 5,184,055
- Issue date Feb 2, 1993
- Canon Kabushiki Kaisha
- Shinji Ohishi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Control system for a servomotor
- Patent number 4,810,941
- Issue date Mar 7, 1989
- Canon Kabushiki Kaisha
- Shinji Ohishi
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS PERFORMING EXAMINATION UTILIZING PHOTOACOUSTIC EFFECT, EX...
- Publication number 20200229705
- Publication date Jul 23, 2020
- Canon Kabushiki Kaisha
- Shinji Ohishi
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
PHOTOACOUSTIC PROBE
- Publication number 20190159760
- Publication date May 30, 2019
- Canon Kabushiki Kaisha
- Shinji Ohishi
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
OBJECT INFORMATION ACQUIRING APPARATUS AND CONTROL METHOD THEREOF
- Publication number 20190082966
- Publication date Mar 21, 2019
- Canon Kabushiki Kaisha
- Shinji Ohishi
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
ULTRASONIC PROBE
- Publication number 20180146950
- Publication date May 31, 2018
- Canon Kabushiki Kaisha
- Shinji Ohishi
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
ACOUSTIC WAVE APPARATUS AND CONTROL METHOD THEREOF
- Publication number 20170367656
- Publication date Dec 28, 2017
- Canon Kabushiki Kaisha
- Shinji Ohishi
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
LITHOGRAPHY APPARATUS, METHOD OF MEASURING SURFACE POSITION, AND ME...
- Publication number 20150092175
- Publication date Apr 2, 2015
- Canon Kabushiki Kaisha
- Shinji Ohishi
- G01 - MEASURING TESTING
Information Patent Application
LITHOGRAPHY APPARATUS AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20150072445
- Publication date Mar 12, 2015
- Canon Kabushiki Kaisha
- Toshiro Yamanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20140302443
- Publication date Oct 9, 2014
- Canon Kabushiki Kaisha
- Shinji OHISHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSMISSION APPARATUS, DRAWING APPARATUS, AND METHOD OF MANUFACTUR...
- Publication number 20140057212
- Publication date Feb 27, 2014
- Canon Kabushiki Kaisha
- Shinji OHISHI
- G02 - OPTICS
Information Patent Application
DRAWING APPARATUS, METHOD OF MANUFACTURING ARTICLE, AND INFORMATION...
- Publication number 20130175453
- Publication date Jul 11, 2013
- Canon Kabushiki Kaisha
- Shinji Ohishi
- B82 - NANO-TECHNOLOGY
Information Patent Application
DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20130063708
- Publication date Mar 14, 2013
- Canon Kabushiki Kaisha
- Shinji Ohishi
- B82 - NANO-TECHNOLOGY
Information Patent Application
DRAWING APPARATUS, METHOD OF MANUFACTURING ARTICLE, METHOD OF MANUF...
- Publication number 20120126459
- Publication date May 24, 2012
- Canon Kabushiki Kaisha
- Shinji Ohishi
- B82 - NANO-TECHNOLOGY
Information Patent Application
STAGE UNIT, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
- Publication number 20090251678
- Publication date Oct 8, 2009
- Canon Kabushiki Kaisha
- Shinji Ohishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
STAGE APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
- Publication number 20080170213
- Publication date Jul 17, 2008
- Canon Kabushiki Kaisha
- Shinji Ohishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
STAGE DEVICE AND EXPOSURE APPARATUS
- Publication number 20080151202
- Publication date Jun 26, 2008
- Canon Kabushiki Kaisha
- Shinji Ohishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
STAGE APPARATUS
- Publication number 20080001482
- Publication date Jan 3, 2008
- Canon Kabushiki Kaisha
- Shinji Ohishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Alignment stage apparatus
- Publication number 20060214518
- Publication date Sep 28, 2006
- Canon Kabushiki Kaisha
- Shinji Ohishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Stage device for positioning an object, in which a static pressure...
- Publication number 20060203223
- Publication date Sep 14, 2006
- Canon Kabushiki Kaisha
- Shinji Ohishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Alignment stage apparatus
- Publication number 20050093378
- Publication date May 5, 2005
- Canon Kabushik Kaisha
- Shinji Ohishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Stage device, exposure apparatus and device manufacturing method
- Publication number 20050073668
- Publication date Apr 7, 2005
- Canon Kabushiki Kaisha
- Shinji Ohishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Alignment stage apparatus, exposure apparatus, and semiconductor de...
- Publication number 20050052143
- Publication date Mar 10, 2005
- Canon Kabushiki Kaisha
- Shinji Ohishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Stage device for an exposure apparatus and semiconductor device man...
- Publication number 20010045526
- Publication date Nov 29, 2001
- Hirohito Itoh
- H01 - BASIC ELECTRIC ELEMENTS

Shinji Ohishi

Person

Patents Grantslast 30 patents

Apparatus performing examination utilizing photoacoustic effect, ex...

Acoustic wave apparatus and control method thereof

Drawing apparatus, method of manufacturing article, method of manuf...

Drawing apparatus, and method of manufacturing article

Drawing apparatus, method of manufacturing article, and information...

Stage unit, exposure apparatus, and device manufacturing method

Stage apparatus

Stage device for positioning an object, in which a static pressure...

Alignment stage apparatus, exposure apparatus, and semiconductor de...

Alignment stage apparatus

Stage device for positioning an object, in which a static pressure...

Alignment stage apparatus

Stage device for an exposure apparatus and semiconductor device man...

Stage system and exposure apparatus with the same

Stage device for an exposure apparatus and semiconductor device man...

Stage device and pattern transfer system using the same

Positioning table device including correction of energization elect...

Stage device for an exposure apparatus and semiconductor device man...

Device for positioning control

Control system for a servomotor

Patents Applicationslast 30 patents

APPARATUS PERFORMING EXAMINATION UTILIZING PHOTOACOUSTIC EFFECT, EX...

PHOTOACOUSTIC PROBE

OBJECT INFORMATION ACQUIRING APPARATUS AND CONTROL METHOD THEREOF

ULTRASONIC PROBE

ACOUSTIC WAVE APPARATUS AND CONTROL METHOD THEREOF

LITHOGRAPHY APPARATUS, METHOD OF MEASURING SURFACE POSITION, AND ME...

LITHOGRAPHY APPARATUS AND METHOD OF MANUFACTURING ARTICLE

DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

TRANSMISSION APPARATUS, DRAWING APPARATUS, AND METHOD OF MANUFACTUR...

DRAWING APPARATUS, METHOD OF MANUFACTURING ARTICLE, AND INFORMATION...

DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

DRAWING APPARATUS, METHOD OF MANUFACTURING ARTICLE, METHOD OF MANUF...

STAGE UNIT, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

STAGE APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

STAGE DEVICE AND EXPOSURE APPARATUS

STAGE APPARATUS

Alignment stage apparatus

Stage device for positioning an object, in which a static pressure...

Alignment stage apparatus

Stage device, exposure apparatus and device manufacturing method

Alignment stage apparatus, exposure apparatus, and semiconductor de...

Stage device for an exposure apparatus and semiconductor device man...