Shinji OKAZAKI

Follow

Person

Tochigi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
EUV light generator
- Patent number 10,863,613
- Issue date Dec 8, 2020
- Gigaphoton Inc.
- Shinji Okazaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Extreme UV light generation device
- Patent number 10,512,149
- Issue date Dec 17, 2019
- Gigaphoton Inc.
- Tsukasa Hori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Two-beam interference apparatus and two-beam interference exposure...
- Patent number 9,507,248
- Issue date Nov 29, 2016
- Gigaphoton Inc.
- Shinji Okazaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Laser apparatus
- Patent number 8,989,225
- Issue date Mar 24, 2015
- Gigaphoton Inc.
- Kouji Kakizaki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
EUV LIGHT GENERATOR
- Publication number 20190394868
- Publication date Dec 26, 2019
- Gigaphoton Inc.
- Shinji OKAZAKI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME UV LIGHT GENERATION DEVICE
- Publication number 20190116655
- Publication date Apr 18, 2019
- Gigaphoton Inc.
- Tsukasa HORI
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
LIGHT SOURCE SYSTEM, BEAM TRANSMISSION SYSTEM, AND EXPOSURE APPARATUS
- Publication number 20170149198
- Publication date May 25, 2017
- Gigaphoton Inc.
- Osamu WAKABAYASHI
- G02 - OPTICS
Information Patent Application
TARGET SUPPLY DEVICE AND EXTREME ULTRAVIOLET LIGHT GENERATION APPAR...
- Publication number 20150144809
- Publication date May 28, 2015
- Gigaphoton Inc.
- Shinji OKAZAKI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LASER APPARATUS
- Publication number 20130215916
- Publication date Aug 22, 2013
- Gigaphoton Inc.
- Kouji KAKIZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TWO-BEAM INTERFERENCE APPARATUS AND TWO-BEAM INTERFERENCE EXPOSURE...
- Publication number 20130135601
- Publication date May 30, 2013
- Gigaphoton Inc.
- Shinji OKAZAKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY