Shinji Orimoto

Person

Nirasaki (Yamanashi), JP

People

Patents Grantslast 30 patents

Information Patent Grant
Temperature measuring mechanism, temperature measuring method, and...
- Patent number 11,605,547
- Issue date Mar 14, 2023
- Tokyo Electron Limited
- Manabu Nakagawasai
- G01 - MEASURING TESTING
Information Patent Grant
Substrate processing apparatus and method
- Patent number 11,532,784
- Issue date Dec 20, 2022
- Tokyo Electron Limited
- Manabu Nakagawasai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering device
- Patent number 11,414,747
- Issue date Aug 16, 2022
- Tokyo Electron Limited
- Junichi Takei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Stage device and processing apparatus
- Patent number 11,417,504
- Issue date Aug 16, 2022
- Tokyo Electron Limited
- Manabu Nakagawasai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Stage device and processing apparatus
- Patent number 11,293,092
- Issue date Apr 5, 2022
- Tokyo Electron Limited
- Manabu Nakagawasai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fixing unit of plate-shaped member, PVD processing apparatus and fi...
- Patent number 10,254,693
- Issue date Apr 9, 2019
- Tokyo Electron Limited
- Hiroyuki Yokohara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrostatic attraction apparatus, electrostatic chuck and cooling...
- Patent number 9,787,222
- Issue date Oct 10, 2017
- Tokyo Electron Limited
- Kaoru Yamamoto
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER

Patents Applicationslast 30 patents

Information Patent Application
FILM FORMING APPARATUS
- Publication number 20230167542
- Publication date Jun 1, 2023
- TOKYO ELECTRON LIMITED
- Junichi TAKEI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND DEVICE FOR SUBSTRATE PROCESSING
- Publication number 20220220606
- Publication date Jul 14, 2022
- TOKYO ELECTRON LIMITED
- Tamaki TAKEYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MOUNTING TABLE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220189813
- Publication date Jun 16, 2022
- TOKYO ELECTRON LIMITED
- Katsuyoshi AIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD
- Publication number 20210280777
- Publication date Sep 9, 2021
- TOKYO ELECTRON LIMITED
- Manabu NAKAGAWASAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLACING TABLE STRUCTURE AND TREATMENT DEVICE
- Publication number 20200381272
- Publication date Dec 3, 2020
- TOKYO ELECTRON LIMITED
- Shinji ORIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE MEASURING MECHANISM, TEMPERATURE MEASURING METHOD, AND...
- Publication number 20200303223
- Publication date Sep 24, 2020
- TOKYO ELECTRON LIMITED
- Manabu Nakagawasai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE DEVICE AND PROCESSING APPARATUS
- Publication number 20200131625
- Publication date Apr 30, 2020
- TOKYO ELECTRON LIMITED
- Manabu NAKAGAWASAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
STAGE DEVICE AND PROCESSING APPARATUS
- Publication number 20200135434
- Publication date Apr 30, 2020
- TOKYO ELECTRON LIMITED
- Manabu NAKAGAWASAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE STAGE AND FILM FORMING APPARATUS
- Publication number 20190390326
- Publication date Dec 26, 2019
- TOKYO ELECTRON LIMITED
- Junichi Takei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING DEVICE
- Publication number 20190390325
- Publication date Dec 26, 2019
- TOKYO ELECTRON LIMITED
- Junichi TAKEI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FIXING UNIT OF PLATE-SHAPED MEMBER, PVD PROCESSING APPARATUS AND FI...
- Publication number 20150370204
- Publication date Dec 24, 2015
- TOKYO ELECTRON LIMITED
- Hiroyuki YOKOHARA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ELECTROSTATIC ATTRACTION APPARATUS, ELECTROSTATIC CHUCK AND COOLING...
- Publication number 20150349668
- Publication date Dec 3, 2015
- TOKYO ELECTRON LIMITED
- Kaoru Yamamoto
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER

Shinji Orimoto

Person

Patents Grantslast 30 patents

Temperature measuring mechanism, temperature measuring method, and...

Substrate processing apparatus and method

Sputtering device

Stage device and processing apparatus

Stage device and processing apparatus

Fixing unit of plate-shaped member, PVD processing apparatus and fi...

Electrostatic attraction apparatus, electrostatic chuck and cooling...

Patents Applicationslast 30 patents

FILM FORMING APPARATUS

METHOD AND DEVICE FOR SUBSTRATE PROCESSING

MOUNTING TABLE AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND METHOD

PLACING TABLE STRUCTURE AND TREATMENT DEVICE

TEMPERATURE MEASURING MECHANISM, TEMPERATURE MEASURING METHOD, AND...

STAGE DEVICE AND PROCESSING APPARATUS

STAGE DEVICE AND PROCESSING APPARATUS

SUBSTRATE STAGE AND FILM FORMING APPARATUS

SPUTTERING DEVICE

FIXING UNIT OF PLATE-SHAPED MEMBER, PVD PROCESSING APPARATUS AND FI...

ELECTROSTATIC ATTRACTION APPARATUS, ELECTROSTATIC CHUCK AND COOLING...