Shinji Sakano

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Yamanashi-ken, JP

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Patents Grantslast 30 patents

Information Patent Grant
Controlling device for substrate processing apparatus and method th...
- Patent number 7,844,357
- Issue date Nov 30, 2010
- Tokyo Electron Limited
- Shinji Sakano
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate processing method and storage medium having program store...
- Patent number 7,774,082
- Issue date Aug 10, 2010
- Tokyo Electron Limited
- Shigeru Kubota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for evaluating processing apparatus status and...
- Patent number 7,689,028
- Issue date Mar 30, 2010
- Tokyo Electron Limited
- Shinji Sakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for predicting consumption of consumable part, method for pr...
- Patent number 7,341,644
- Issue date Mar 11, 2008
- Tokyo Electron Limited
- Shinji Sakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Operation monitoring method for treatment apparatus
- Patent number 7,054,786
- Issue date May 30, 2006
- Tokyo Electron Limited
- Shinji Sakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching end-point detecting method
- Patent number 6,586,262
- Issue date Jul 1, 2003
- Tokyo Electron Limited
- Susumu Saito
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CONTROLLING DEVICE FOR SUBSTRATE PROCESSING APPARATUS AND METHOD TH...
- Publication number 20090132078
- Publication date May 21, 2009
- TOKYO ELECTRON LIMITED
- Shinji SAKANO
- G05 - CONTROLLING REGULATING
Information Patent Application
CONTROLLING DEVICE FOR SUBSTRATE PROCESSING APPARATUS AND METHOD TH...
- Publication number 20080167744
- Publication date Jul 10, 2008
- TOKYO ELECTRON LIMITED
- Shinji SAKANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND STORAGE MEDIUM HAVING PROGRAM STORE...
- Publication number 20080091290
- Publication date Apr 17, 2008
- TOKYO ELECTRON LIMITED
- Shigeru KUBOTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for evaluating processing apparatus status and...
- Publication number 20050125090
- Publication date Jun 9, 2005
- TOKYO ELECTRON LIMITED
- Shinji Sakano
- G05 - CONTROLLING REGULATING
Information Patent Application
Operation monitoring method for treatment apparatus
- Publication number 20040254761
- Publication date Dec 16, 2004
- Shinji Sakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for predicting consumption of consumable part, method for pr...
- Publication number 20040007560
- Publication date Jan 15, 2004
- Shinji Sakano
- H01 - BASIC ELECTRIC ELEMENTS