Shinji SATO

Person

Fukaya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Liquid immersion exposure apparatus
- Patent number 10,768,537
- Issue date Sep 8, 2020
- Nikon Corporation
- Shinji Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid immersion member, exposure apparatus, exposing method, metho...
- Patent number 10,739,683
- Issue date Aug 11, 2020
- Nikon Corporation
- Shinji Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposing method, method for manufacturing devic...
- Patent number 10,678,141
- Issue date Jun 9, 2020
- Nikon Corporation
- Shinji Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposing method, method for manufacturing devic...
- Patent number 10,599,050
- Issue date Mar 24, 2020
- Nikon Corporation
- Shinji Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposing method, method for manufacturing devic...
- Patent number 10,444,634
- Issue date Oct 15, 2019
- Nikon Corporation
- Shinji Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid immersion member, exposure apparatus, exposing method, metho...
- Patent number 10,423,080
- Issue date Sep 24, 2019
- Nikon Corporation
- Shinji Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid immersion exposure apparatus
- Patent number 10,409,177
- Issue date Sep 10, 2019
- Nikon Corporation
- Shinji Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid immersion member, exposure apparatus, exposing method, metho...
- Patent number 10,133,189
- Issue date Nov 20, 2018
- Nikon Corporation
- Shinji Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid immersion member, exposure apparatus, exposing method, metho...
- Patent number 10,095,127
- Issue date Oct 9, 2018
- Nikon Corporation
- Shinji Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid immersion member, exposure apparatus, exposure method, and m...
- Patent number 10,082,738
- Issue date Sep 25, 2018
- Nikon Corporation
- Shinji Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid immersion member, exposure apparatus, exposing method, metho...
- Patent number 10,007,189
- Issue date Jun 26, 2018
- Nikon Corporation
- Shinji Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid immersion member, exposure apparatus, exposing method, metho...
- Patent number 9,927,724
- Issue date Mar 27, 2018
- Nikon Corporation
- Shinji Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposing method, method for manufacturing devic...
- Patent number 9,915,882
- Issue date Mar 13, 2018
- Nikon Corporation
- Shinji Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposing method, device manufacturing method, p...
- Patent number 9,910,365
- Issue date Mar 6, 2018
- Nikon Corporation
- Shinji Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid immersion member, exposure apparatus, exposing method, metho...
- Patent number 9,904,184
- Issue date Feb 27, 2018
- Nikon Corporation
- Shinji Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposing method, method for manufacturing devic...
- Patent number 9,857,700
- Issue date Jan 2, 2018
- Nikon Corporation
- Shinji Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid immersion member, exposure apparatus, exposing method, metho...
- Patent number 9,823,580
- Issue date Nov 21, 2017
- Nikon Corporation
- Shinji Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid immersion member, exposure apparatus, exposing method, metho...
- Patent number 9,823,583
- Issue date Nov 21, 2017
- Nikon Corporation
- Shinji Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid immersion member, exposure apparatus, exposing method, metho...
- Patent number 9,823,582
- Issue date Nov 21, 2017
- Nikon Corporation
- Shinji Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid immersion member, exposure apparatus, exposing method, metho...
- Patent number 9,720,331
- Issue date Aug 1, 2017
- Nikon Corporation
- Shinji Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid immersion member, exposure apparatus, exposing method, metho...
- Patent number 9,651,873
- Issue date May 16, 2017
- Nikon Corporation
- Shinji Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and device manufacturing method
- Patent number 9,612,538
- Issue date Apr 4, 2017
- Nikon Corporation
- Shinji Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposing method, device manufacturing method, p...
- Patent number 9,568,828
- Issue date Feb 14, 2017
- Nikon Corporation
- Shinji Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid immersion member, exposure apparatus, exposing method, metho...
- Patent number 9,557,654
- Issue date Jan 31, 2017
- Nikon Corporation
- Shinji Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposing method, method for manufacturing devic...
- Patent number 9,507,265
- Issue date Nov 29, 2016
- Nikon Corporation
- Shinji Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposing method, device manufacturing method, p...
- Patent number 9,494,870
- Issue date Nov 15, 2016
- Nikon Corporation
- Shinji Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, method of manufacturing device...
- Patent number 9,494,876
- Issue date Nov 15, 2016
- Nikon Corporation
- Shinji Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, method of manufacturing device...
- Patent number 9,329,496
- Issue date May 3, 2016
- Nikon Corporation
- Shinji Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid immersion member, exposure apparatus, exposing method, metho...
- Patent number 9,268,231
- Issue date Feb 23, 2016
- Nikon Corporation
- Shinji Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid immersion member
- Patent number 8,953,143
- Issue date Feb 10, 2015
- Nikon Corporation
- Shinji Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
POSITION MEASUREMENT DEVICE AND POSITION MEASUREMENT METHOD
- Publication number 20240393100
- Publication date Nov 28, 2024
- Nikon Corporation
- Shinji SATO
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
POSITION MEASUREMENT DEVICE, POSITION MEASUREMENT SYSTEM, AND MEASU...
- Publication number 20240393101
- Publication date Nov 28, 2024
- Nikon Corporation
- Shinji SATO
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SOLDERING APPARATUS AND SOLDERING SYSTEM, AND PROCESSING APPARATUS
- Publication number 20230381877
- Publication date Nov 30, 2023
- Nikon Corporation
- Koji HOSOMI
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
PROCESSING SYSTEM
- Publication number 20230256537
- Publication date Aug 17, 2023
- Nikon Corporation
- Shinji SATO
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
BLADE, PROCESSING SYSTEM AND PROCESSING METHOD
- Publication number 20230134254
- Publication date May 4, 2023
- Nikon Corporation
- Shinji SATO
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
PROCESSING APPARATUS
- Publication number 20220355412
- Publication date Nov 10, 2022
- Nikon Corporation
- Shinji SATO
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
PROCESS SYSTEM
- Publication number 20220331898
- Publication date Oct 20, 2022
- Nikon Corporation
- Shinji SATO
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
PROCESSING SYSTEM, PROCESSING METHOD, ROBOT SYSTEM, CONNECTING APPA...
- Publication number 20220281104
- Publication date Sep 8, 2022
- Nikon Corporation
- Shinji SATO
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
ROBOT SYSTEM, END EFFECTOR SYSTEM, END EFFECTOR UNIT, AND ADAPTER
- Publication number 20220266454
- Publication date Aug 25, 2022
- Nikon Corporation
- Shinji SATO
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
PROCESSING SYSTEM AND INSPECTION SYSTEM
- Publication number 20220196569
- Publication date Jun 23, 2022
- Nikon Corporation
- Shinji SATO
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXPOSURE APPARATUS, EXPOSING METHOD, METHOD FOR MANUFACTURING DEVIC...
- Publication number 20200041912
- Publication date Feb 6, 2020
- Nikon Corporation
- Shinji SATO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LIQUID IMMERSION MEMBER, EXPOSURE APPARATUS, EXPOSING METHOD, METHO...
- Publication number 20200012201
- Publication date Jan 9, 2020
- Nikon Corporation
- Shinji SATO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LIQUID IMMERSION EXPOSURE APPARATUS
- Publication number 20190391503
- Publication date Dec 26, 2019
- Nikon Corporation
- Shinji SATO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LIQUID IMMERSION MEMBER, EXPOSURE APPARATUS, EXPOSING METHOD, METHO...
- Publication number 20190049855
- Publication date Feb 14, 2019
- Nikon Corporation
- Shinji SATO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LIQUID IMMERSION MEMBER, EXPOSURE APPARATUS, EXPOSING METHOD, METHO...
- Publication number 20190025716
- Publication date Jan 24, 2019
- Nikon Corporation
- Shinji SATO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LIQUID IMMERSION MEMBER, EXPOSURE APPARATUS, EXPOSING METHOD, METHO...
- Publication number 20180314166
- Publication date Nov 1, 2018
- Nikon Corporation
- Shinji SATO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LIQUID IMMERSION MEMBER, EXPOSURE APPARATUS, EXPOSING METHOD, METHO...
- Publication number 20180217511
- Publication date Aug 2, 2018
- Nikon Corporation
- Shinji SATO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, EXPOSING METHOD, METHOD FOR MANUFACTURING DEVIC...
- Publication number 20180196359
- Publication date Jul 12, 2018
- Nikon Corporation
- Shinji SATO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LIQUID IMMERSION MEMBER, EXPOSURE APPARATUS, EXPOSING METHOD, METHO...
- Publication number 20180052397
- Publication date Feb 22, 2018
- Nikon Corporation
- Shinji SATO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, EXPOSING METHOD, METHOD FOR MANUFACTURING DEVIC...
- Publication number 20180052399
- Publication date Feb 22, 2018
- Nikon Corporation
- Shinji SATO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LIQUID IMMERSION MEMBER, EXPOSURE APPARATUS, EXPOSING METHOD, METHO...
- Publication number 20180039189
- Publication date Feb 8, 2018
- Nikon Corporation
- Shinji SATO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LIQUID IMMERSION MEMBER, EXPOSURE APPARATUS, EXPOSING METHOD, METHO...
- Publication number 20170219941
- Publication date Aug 3, 2017
- Nikon Corporation
- Shinji SATO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, EXPOSING METHOD, DEVICE MANUFACTURING METHOD, P...
- Publication number 20170139331
- Publication date May 18, 2017
- Nikon Corporation
- Shinji SATO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LIQUID IMMERSION MEMBER, EXPOSURE APPARATUS, EXPOSING METHOD, METHO...
- Publication number 20170108786
- Publication date Apr 20, 2017
- Nikon Corporation
- Shinji SATO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, EXPOSING METHOD, METHOD FOR MANUFACTURING DEVIC...
- Publication number 20170075235
- Publication date Mar 16, 2017
- Nikon Corporation
- Shinji SATO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, EXPOSING METHOD, DEVICE MANUFACTURING METHOD, P...
- Publication number 20170060002
- Publication date Mar 2, 2017
- Nikon Corporation
- Shinji SATO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, METHOD OF MANUFACTURING DEVICE...
- Publication number 20160238952
- Publication date Aug 18, 2016
- Nikon Corporation
- Shinji SATO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LIQUID IMMERSION MEMBER, EXPOSURE APPARATUS, EXPOSING METHOD, METHO...
- Publication number 20160161860
- Publication date Jun 9, 2016
- Nikon Corporation
- Shinji SATO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LIQUID IMMERSION MEMBER, EXPOSURE APPARATUS, EXPOSURE METHOD, AND M...
- Publication number 20160077448
- Publication date Mar 17, 2016
- Nikon Corporation
- Shinji SATO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LIQUID IMMERSION MEMBER, EXPOSURE APPARATUS, EXPOSING METHOD, METHO...
- Publication number 20160077447
- Publication date Mar 17, 2016
- Nikon Corporation
- Shinji SATO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Shinji SATO

Person

Patents Grantslast 30 patents

Liquid immersion exposure apparatus

Liquid immersion member, exposure apparatus, exposing method, metho...

Exposure apparatus, exposing method, method for manufacturing devic...

Exposure apparatus, exposing method, method for manufacturing devic...

Exposure apparatus, exposing method, method for manufacturing devic...

Liquid immersion member, exposure apparatus, exposing method, metho...

Liquid immersion exposure apparatus

Liquid immersion member, exposure apparatus, exposing method, metho...

Liquid immersion member, exposure apparatus, exposing method, metho...

Liquid immersion member, exposure apparatus, exposure method, and m...

Liquid immersion member, exposure apparatus, exposing method, metho...

Liquid immersion member, exposure apparatus, exposing method, metho...

Exposure apparatus, exposing method, method for manufacturing devic...

Exposure apparatus, exposing method, device manufacturing method, p...

Liquid immersion member, exposure apparatus, exposing method, metho...

Exposure apparatus, exposing method, method for manufacturing devic...

Liquid immersion member, exposure apparatus, exposing method, metho...

Liquid immersion member, exposure apparatus, exposing method, metho...

Liquid immersion member, exposure apparatus, exposing method, metho...

Liquid immersion member, exposure apparatus, exposing method, metho...

Liquid immersion member, exposure apparatus, exposing method, metho...

Exposure apparatus, exposure method, and device manufacturing method

Exposure apparatus, exposing method, device manufacturing method, p...

Liquid immersion member, exposure apparatus, exposing method, metho...

Exposure apparatus, exposing method, method for manufacturing devic...

Exposure apparatus, exposing method, device manufacturing method, p...

Exposure apparatus, exposure method, method of manufacturing device...

Exposure apparatus, exposure method, method of manufacturing device...

Liquid immersion member, exposure apparatus, exposing method, metho...

Liquid immersion member

Patents Applicationslast 30 patents

POSITION MEASUREMENT DEVICE AND POSITION MEASUREMENT METHOD

POSITION MEASUREMENT DEVICE, POSITION MEASUREMENT SYSTEM, AND MEASU...

SOLDERING APPARATUS AND SOLDERING SYSTEM, AND PROCESSING APPARATUS

PROCESSING SYSTEM

BLADE, PROCESSING SYSTEM AND PROCESSING METHOD

PROCESSING APPARATUS

PROCESS SYSTEM

PROCESSING SYSTEM, PROCESSING METHOD, ROBOT SYSTEM, CONNECTING APPA...

ROBOT SYSTEM, END EFFECTOR SYSTEM, END EFFECTOR UNIT, AND ADAPTER

PROCESSING SYSTEM AND INSPECTION SYSTEM

EXPOSURE APPARATUS, EXPOSING METHOD, METHOD FOR MANUFACTURING DEVIC...

LIQUID IMMERSION MEMBER, EXPOSURE APPARATUS, EXPOSING METHOD, METHO...

LIQUID IMMERSION EXPOSURE APPARATUS

LIQUID IMMERSION MEMBER, EXPOSURE APPARATUS, EXPOSING METHOD, METHO...

LIQUID IMMERSION MEMBER, EXPOSURE APPARATUS, EXPOSING METHOD, METHO...

LIQUID IMMERSION MEMBER, EXPOSURE APPARATUS, EXPOSING METHOD, METHO...

LIQUID IMMERSION MEMBER, EXPOSURE APPARATUS, EXPOSING METHOD, METHO...

EXPOSURE APPARATUS, EXPOSING METHOD, METHOD FOR MANUFACTURING DEVIC...

LIQUID IMMERSION MEMBER, EXPOSURE APPARATUS, EXPOSING METHOD, METHO...

EXPOSURE APPARATUS, EXPOSING METHOD, METHOD FOR MANUFACTURING DEVIC...

LIQUID IMMERSION MEMBER, EXPOSURE APPARATUS, EXPOSING METHOD, METHO...

LIQUID IMMERSION MEMBER, EXPOSURE APPARATUS, EXPOSING METHOD, METHO...

EXPOSURE APPARATUS, EXPOSING METHOD, DEVICE MANUFACTURING METHOD, P...

LIQUID IMMERSION MEMBER, EXPOSURE APPARATUS, EXPOSING METHOD, METHO...

EXPOSURE APPARATUS, EXPOSING METHOD, METHOD FOR MANUFACTURING DEVIC...

EXPOSURE APPARATUS, EXPOSING METHOD, DEVICE MANUFACTURING METHOD, P...

EXPOSURE APPARATUS, EXPOSURE METHOD, METHOD OF MANUFACTURING DEVICE...

LIQUID IMMERSION MEMBER, EXPOSURE APPARATUS, EXPOSING METHOD, METHO...

LIQUID IMMERSION MEMBER, EXPOSURE APPARATUS, EXPOSURE METHOD, AND M...

LIQUID IMMERSION MEMBER, EXPOSURE APPARATUS, EXPOSING METHOD, METHO...