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Shinji Tarutani
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Tokyo, JP
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Patents Grants
last 30 patents
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Patent Grant
Developer having substrate oscillating system and method of develop...
Patent number
6,755,579
Issue date
Jun 29, 2004
Renesas Technology Corp.
Shinji Tarutani
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Micropattern forming material and method for forming micropattern
Publication number
20060246380
Publication date
Nov 2, 2006
Renesas Technology Corp.
Mamoru Terai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Micropattern forming material and fine structure forming method
Publication number
20040072096
Publication date
Apr 15, 2004
Renesas Technology Corp.
Mamoru Terai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Micropattern forming material, micropattern forming method and meth...
Publication number
20040029047
Publication date
Feb 12, 2004
Renesas Technology Corp.
Takeo Ishibashi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Resist pattern formation method
Publication number
20040018646
Publication date
Jan 29, 2004
Mitsubishi Denki Kabushiki Kaisha
Shinji Tarutani
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Developer having substrate oscillating system and method of develop...
Publication number
20040009432
Publication date
Jan 15, 2004
Mitsubishi Denki Kabushiki Kaisha
Shinji Tarutani
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY