Shinji Tsutsui

Person

Utsunomiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 8,035,668
- Issue date Oct 11, 2011
- Canon Kabushiki Kaisha
- Mitsuro Sugita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Scanning exposure apparatus and method
- Patent number 6,947,122
- Issue date Sep 20, 2005
- Canon Kabushiki Kaisha
- Tohru Kohda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
In-line processing system
- Patent number 5,993,081
- Issue date Nov 30, 1999
- Canon Kabushiki Kaisha
- Hiroyuki Itoh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus and method for controlling a stage on...
- Patent number 5,850,291
- Issue date Dec 15, 1998
- Canon Kabushiki Kaisha
- Shinji Tsutsui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus including device for determining movement of an...
- Patent number 5,150,152
- Issue date Sep 22, 1992
- Canon Kabushiki Kaisha
- Junji Isohata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mask holder and a mask conveying and holding mechanism using the same
- Patent number 4,924,258
- Issue date May 8, 1990
- Canon Kabushiki Kaisha
- Shinji Tsutsui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Photomask positioning device
- Patent number 4,820,930
- Issue date Apr 11, 1989
- Canon Kabushiki Kaisha
- Shinji Tsutsui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pattern transfer apparatus
- Patent number 4,720,732
- Issue date Jan 19, 1988
- Canon Kabushiki Kaisha
- Shinji Tsutsui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Cassette-type container for a sheet-like member
- Patent number 4,611,967
- Issue date Sep 16, 1986
- Canon Kabushiki Kaisha
- Shinji Tsutsui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Semiconductor exposure apparatus
- Patent number 4,564,284
- Issue date Jan 14, 1986
- Canon Kabushiki Kaisha
- Shinji Tsutsui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of and apparatus for adsorbingly fixing a body
- Patent number 4,561,688
- Issue date Dec 31, 1985
- Canon Kabushiki Kaisha
- Shinji Tsutsui
- B66 - HOISTING LIFTING HAULING

Patents Applicationslast 30 patents

Information Patent Application
Exposure apparatus and device manufacturing method
- Publication number 20060158504
- Publication date Jul 20, 2006
- Mitsuro Sugita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Scanning exposure apparatus and method
- Publication number 20050206867
- Publication date Sep 22, 2005
- Canon Kabushiki Kaisha
- Tohru Kohda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Scanning exposure apparatus and method
- Publication number 20040001191
- Publication date Jan 1, 2004
- Canon Kabushiki Kaisha
- Tohru Kohda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Shinji Tsutsui

Person

Patents Grantslast 30 patents

Exposure apparatus and device manufacturing method

Scanning exposure apparatus and method

In-line processing system

Projection exposure apparatus and method for controlling a stage on...

Exposure apparatus including device for determining movement of an...

Mask holder and a mask conveying and holding mechanism using the same

Photomask positioning device

Pattern transfer apparatus

Cassette-type container for a sheet-like member

Semiconductor exposure apparatus

Method of and apparatus for adsorbingly fixing a body

Patents Applicationslast 30 patents

Exposure apparatus and device manufacturing method

Scanning exposure apparatus and method

Scanning exposure apparatus and method