Shinji WAKABAYASHI

Person

Yamanashi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Vacuum processing apparatus and substrate transfer method
- Patent number 11,688,619
- Issue date Jun 27, 2023
- Tokyo Electron Limited
- Shinji Wakabayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer mechanism, substrate processing apparatus, and s...
- Patent number 11,404,299
- Issue date Aug 2, 2022
- Tokyo Electron Limited
- Shinji Wakabayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer device
- Patent number 11,335,586
- Issue date May 17, 2022
- Tokyo Electron Limited
- Takehiro Shindo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing device
- Patent number 10,906,756
- Issue date Feb 2, 2021
- Tokyo Electron Limited
- Shinji Wakabayashi
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Load lock apparatus and substrate processing system
- Patent number 10,431,481
- Issue date Oct 1, 2019
- Tokyo Electron Limited
- Shinji Wakabayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate detection apparatus, substrate detection method and subst...
- Patent number 10,429,543
- Issue date Oct 1, 2019
- Tokyo Electron Limited
- Toshiaki Kodama
- G01 - MEASURING TESTING
Information Patent Grant
Carrier transport device and carrier transport method
- Patent number 10,403,529
- Issue date Sep 3, 2019
- Tokyo Electron Limited
- Shinji Wakabayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer chamber and container connecting mechanism with...
- Patent number 10,229,847
- Issue date Mar 12, 2019
- Tokyo Electron Limited
- Shinji Wakabayashi
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Substrate conveyance apparatus
- Patent number 9,962,840
- Issue date May 8, 2018
- Tokyo Electron Limited
- Shinji Wakabayashi
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate processing device and substrate transfer method
- Patent number 9,929,030
- Issue date Mar 27, 2018
- Tokyo Electron Limited
- Shinji Wakabayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, cover opening and closing mechanism...
- Patent number 9,887,115
- Issue date Feb 6, 2018
- Tokyo Electron Limited
- Shinji Wakabayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gate valve and substrate processing system
- Patent number 9,732,881
- Issue date Aug 15, 2017
- Tokyo Electron Limited
- Shinji Wakabayashi
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Vacuum processing apparatus
- Patent number 9,443,749
- Issue date Sep 13, 2016
- Tokyo Electron Limited
- Shinji Wakabayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for setting substrate-treatment time, and storage medium
- Patent number 9,389,607
- Issue date Jul 12, 2016
- Tokyo Electron Limited
- Shinji Wakabayashi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate processing apparatus
- Patent number 9,330,950
- Issue date May 3, 2016
- Tokyo Electron Limited
- Shinji Wakabayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate relay apparatus, substrate relay method, and substrate pr...
- Patent number 9,269,599
- Issue date Feb 23, 2016
- Tokyo Electron Limited
- Shinji Wakabayashi
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Electric actuator
- Patent number 9,096,395
- Issue date Aug 4, 2015
- Tokyo Electron Limited
- Shinji Wakabayashi
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Substrate processing system, substrate processing method and storag...
- Patent number 8,999,103
- Issue date Apr 7, 2015
- Tokyo Electron Limited
- Shinji Wakabayashi
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Container changing system and container changing method
- Patent number 8,123,456
- Issue date Feb 28, 2012
- Tokyo Electron Limited
- Shinji Wakabayashi
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Wafer transfer apparatus, wafer transfer method and storage medium
- Patent number 8,025,475
- Issue date Sep 27, 2011
- Tokyo Electron Limited
- Shinji Wakabayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate carrying apparatus and substrate carrying method
- Patent number 8,021,513
- Issue date Sep 20, 2011
- Tokyo Electron Limited
- Shinji Wakabayashi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND METHOD OF ESTIMATING HEIGHT OF ANNU...
- Publication number 20220365187
- Publication date Nov 17, 2022
- TOKYO ELECTRON LIMITED
- Toshiaki KODAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM PROCESS APPARATUS AND SUBSTRATE TRANSFER METHOD
- Publication number 20220044952
- Publication date Feb 10, 2022
- TOKYO ELECTRON LIMITED
- Shinji WAKABAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER DEVICE
- Publication number 20210305081
- Publication date Sep 30, 2021
- TOKYO ELECTRON LIMITED
- Takehiro SHINDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER MECHANISM, SUBSTRATE PROCESSING APPARATUS, AND S...
- Publication number 20200075377
- Publication date Mar 5, 2020
- TOKYO ELECTRON LIMITED
- Shinji WAKABAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING DEVICE
- Publication number 20190152722
- Publication date May 23, 2019
- TOKYO ELECTRON LIMITED
- Shinji WAKABAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CARRIER TRANSPORT DEVICE AND CARRIER TRANSPORT METHOD
- Publication number 20180033663
- Publication date Feb 1, 2018
- TOKYO ELECTRON LIMITED
- Shinji WAKABAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER CHAMBER AND CONTAINER CONNECTING MECHANISM
- Publication number 20170154799
- Publication date Jun 1, 2017
- TOKYO ELECTRON LIMITED
- Shinji WAKABAYASHI
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
LOAD LOCK APPARATUS AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20170025290
- Publication date Jan 26, 2017
- TOKYO ELECTRON LIMITED
- Shinji WAKABAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Detection Apparatus, Substrate Detection Method and Subst...
- Publication number 20160240412
- Publication date Aug 18, 2016
- TOKYO ELECTRON LIMITED
- Toshiaki KODAMA
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE CONVEYANCE APPARATUS
- Publication number 20160082599
- Publication date Mar 24, 2016
- TOKYO ELECTRON LIMITED
- Shinji Wakabayashi
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
GATE VALVE AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20160084389
- Publication date Mar 24, 2016
- TOKYO ELECTRON LIMITED
- Shinji Wakabayashi
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, COVER OPENING AND CLOSING MECHANISM...
- Publication number 20150340259
- Publication date Nov 26, 2015
- TOKYO ELECTRON LIMITED
- Shinji WAKABAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING DEVICE AND SUBSTRATE TRANSFER METHOD
- Publication number 20150303083
- Publication date Oct 22, 2015
- TOKYO ELECTRON LIMITED
- Shinji WAKABAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTAINER INTERCHANGING METHOD
- Publication number 20150221537
- Publication date Aug 6, 2015
- TOKYO ELECTRON LIMITED
- Shinji WAKABAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER METHOD
- Publication number 20150098790
- Publication date Apr 9, 2015
- TOKYO ELECTRON LIMITED
- Shinji WAKABAYASHI
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE TRANSFER CHAMBER AND CONTAINER CONNECTING MECHANISM
- Publication number 20150098788
- Publication date Apr 9, 2015
- TOKYO ELECTRON LIMITED
- Shinji WAKABAYASHI
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
METHOD FOR SETTING SUBSTRATE-TREATMENT TIME, AND STORAGE MEDIUM
- Publication number 20140188267
- Publication date Jul 3, 2014
- TOKYO ELECTRON LIMITED
- Shinji Wakabayashi
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
ELECTRIC ACTUATOR
- Publication number 20140110224
- Publication date Apr 24, 2014
- TOKYO ELECTRON LIMITED
- Shinji Wakabayashi
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
SUBSTRATE RELAY APPARATUS, SUBSTRATE RELAY METHOD, AND SUBSTRATE PR...
- Publication number 20130309047
- Publication date Nov 21, 2013
- TOKYO ELECTRON LIMITED
- Shinji Wakabayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM PROCESSING APPARATUS
- Publication number 20130302115
- Publication date Nov 14, 2013
- TOKYO ELECTRON LIMITED
- Shinji Wakabayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20100236718
- Publication date Sep 23, 2010
- TOKYO ELECTRON LIMITED
- Shinji WAKABAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHECK VALVE AND SUBSTRATE PROCESSING APPARATUS USING SAME
- Publication number 20090116938
- Publication date May 7, 2009
- TOKYO ELECTRON LIMITED
- Shinji WAKABAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE POSITIONAL MISALIGNMENT DETECTION SYSTEM
- Publication number 20090060692
- Publication date Mar 5, 2009
- TOKYO ELECTRON LIMITED
- Shinji Wakabayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE RECEIVING APPARATUS AND SUBSTRATE RECEIVING METHOD
- Publication number 20090060691
- Publication date Mar 5, 2009
- TOKYO ELECTRON LIMITED
- Shinji Wakabayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTAINER CHANGING SYSTEM AND CONTAINER CHANGING METHOD
- Publication number 20090060697
- Publication date Mar 5, 2009
- TOKYO ELECTRON LIMITED
- Shinji Wakabayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer transfer apparatus, wafer transfer method and storage medium
- Publication number 20090053023
- Publication date Feb 26, 2009
- Shinji Wakabayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing system, substrate processing method and storag...
- Publication number 20080053957
- Publication date Mar 6, 2008
- TOKYO ELECTRON LIMITED
- Shinji Wakabayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate carrying apparatus and substrate carrying method
- Publication number 20080050924
- Publication date Feb 28, 2008
- TOKYO ELECTRON LIMITED
- Shinji Wakabayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Processing apparatus, and system and program for monitoring and con...
- Publication number 20060222478
- Publication date Oct 5, 2006
- TOKYO ELECTRON LIMITED
- Shinji Wakabayashi
- F24 - HEATING RANGES VENTILATING
Information Patent Application
Processing apparatus and recording medium
- Publication number 20060215347
- Publication date Sep 28, 2006
- TOKYO ELECTRON LIMITED
- Shinji Wakabayashi
- H01 - BASIC ELECTRIC ELEMENTS

Shinji WAKABAYASHI

Person

Patents Grantslast 30 patents

Vacuum processing apparatus and substrate transfer method

Substrate transfer mechanism, substrate processing apparatus, and s...

Transfer device

Substrate processing device

Load lock apparatus and substrate processing system

Substrate detection apparatus, substrate detection method and subst...

Carrier transport device and carrier transport method

Substrate transfer chamber and container connecting mechanism with...

Substrate conveyance apparatus

Substrate processing device and substrate transfer method

Substrate processing apparatus, cover opening and closing mechanism...

Gate valve and substrate processing system

Vacuum processing apparatus

Method for setting substrate-treatment time, and storage medium

Substrate processing apparatus

Substrate relay apparatus, substrate relay method, and substrate pr...

Electric actuator

Substrate processing system, substrate processing method and storag...

Container changing system and container changing method

Wafer transfer apparatus, wafer transfer method and storage medium

Substrate carrying apparatus and substrate carrying method

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING SYSTEM AND METHOD OF ESTIMATING HEIGHT OF ANNU...

VACUUM PROCESS APPARATUS AND SUBSTRATE TRANSFER METHOD

TRANSFER DEVICE

SUBSTRATE TRANSFER MECHANISM, SUBSTRATE PROCESSING APPARATUS, AND S...

SUBSTRATE PROCESSING DEVICE

CARRIER TRANSPORT DEVICE AND CARRIER TRANSPORT METHOD

SUBSTRATE TRANSFER CHAMBER AND CONTAINER CONNECTING MECHANISM

LOAD LOCK APPARATUS AND SUBSTRATE PROCESSING SYSTEM

Substrate Detection Apparatus, Substrate Detection Method and Subst...

SUBSTRATE CONVEYANCE APPARATUS

GATE VALVE AND SUBSTRATE PROCESSING SYSTEM

SUBSTRATE PROCESSING APPARATUS, COVER OPENING AND CLOSING MECHANISM...

SUBSTRATE PROCESSING DEVICE AND SUBSTRATE TRANSFER METHOD

CONTAINER INTERCHANGING METHOD

SUBSTRATE TRANSFER METHOD

SUBSTRATE TRANSFER CHAMBER AND CONTAINER CONNECTING MECHANISM

METHOD FOR SETTING SUBSTRATE-TREATMENT TIME, AND STORAGE MEDIUM

ELECTRIC ACTUATOR

SUBSTRATE RELAY APPARATUS, SUBSTRATE RELAY METHOD, AND SUBSTRATE PR...

VACUUM PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

CHECK VALVE AND SUBSTRATE PROCESSING APPARATUS USING SAME

SUBSTRATE POSITIONAL MISALIGNMENT DETECTION SYSTEM

SUBSTRATE RECEIVING APPARATUS AND SUBSTRATE RECEIVING METHOD

CONTAINER CHANGING SYSTEM AND CONTAINER CHANGING METHOD

Wafer transfer apparatus, wafer transfer method and storage medium

Substrate processing system, substrate processing method and storag...

Substrate carrying apparatus and substrate carrying method

Processing apparatus, and system and program for monitoring and con...

Processing apparatus and recording medium