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Shinji Wakamoto
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Tokyo, JP
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last 30 patents
Information
Patent Grant
Exposure apparatus, exposure method and process for producing device
Patent number
7,023,521
Issue date
Apr 4, 2006
Nikon Corporation
Shinji Wakamoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Scanning exposure method
Patent number
RE38176
Issue date
Jul 8, 2003
Nikon Corporation
Shinji Wakamoto
355 - Photocopying
Information
Patent Grant
Scanning exposure method detecting focus during relative movement b...
Patent number
6,455,214
Issue date
Sep 24, 2002
Nikon Corporation
Shinji Wakamoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Scanning exposure method and apparatus
Patent number
6,396,071
Issue date
May 28, 2002
Nikon Corporation
Kenji Nishi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection exposure method and apparatus capable of performing focu...
Patent number
RE37359
Issue date
Sep 11, 2001
Nikon Corporation
Shinji Wakamoto
250 - Radiant energy
Information
Patent Grant
Scanning exposure method
Patent number
6,277,533
Issue date
Aug 21, 2001
Nikon Corporation
Shinji Wakamoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Scanning exposure method
Patent number
6,118,515
Issue date
Sep 12, 2000
Nikon Corporation
Shinji Wakamoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Scanning exposure method and apparatus in which a mask and a substr...
Patent number
6,100,515
Issue date
Aug 8, 2000
Nikon Corporation
Kenji Nishi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Methods for measuring image-formation characteristics of a projecti...
Patent number
5,985,495
Issue date
Nov 16, 1999
Nikon Corporation
Masahiko Okumura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection exposure method and apparatus capable of performing focu...
Patent number
5,635,722
Issue date
Jun 3, 1997
Nikon Corporation
Shinji Wakamoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Scanning exposure method
Patent number
5,617,182
Issue date
Apr 1, 1997
Nikon Corporation
Shinji Wakamoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Scanning exposure method and apparatus
Patent number
5,591,958
Issue date
Jan 7, 1997
Nikon Corporation
Kenji Nishi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Inclination detecting apparatus and method
Patent number
5,510,892
Issue date
Apr 23, 1996
Nikon Corporation
Hideo Mizutani
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of and apparatus for detecting plane position
Patent number
5,502,311
Issue date
Mar 26, 1996
Nikon Corporation
Yuji Imai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Inclination detecting apparatus having an intensity adjusting unit
Patent number
5,473,166
Issue date
Dec 5, 1995
Nikon Corporation
Yuji Imai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Surface-position setting apparatus
Patent number
5,461,237
Issue date
Oct 24, 1995
Nikon Corporation
Shinji Wakamoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
ANALYZING METHOD, ANALYSIS APPARATUS, MEASURING METHOD, MEASUREMENT...
Publication number
20240045348
Publication date
Feb 8, 2024
Nikon Corporation
Ayako SUGIMOTO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Exposure apparatus, exposure method and process for producing device
Publication number
20030058423
Publication date
Mar 27, 2003
Nikon Corporation
Shinji Wakamoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Scanning exposure method and apparatus
Publication number
20020050576
Publication date
May 2, 2002
NIKON CORPORATION
Kenji Nishi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY