SHINJI WAKUI

Person

UTSUNOMIYA-SHI, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus anti-vibration apparatus, system identification...
- Patent number 7,072,777
- Issue date Jul 4, 2006
- Canon Kabushiki Kaisha
- Shinji Wakui
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Temperature adjusting system in exposure apparatus
- Patent number 6,809,300
- Issue date Oct 26, 2004
- Canon Kabushiki Kaisha
- Shinji Wakui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Active anti-vibration apparatus and exposure apparatus
- Patent number 6,684,132
- Issue date Jan 27, 2004
- Canon Kabushiki Kaisha
- Shinji Wakui
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Pedestal with vibration sensor, and exposure apparatus having the same
- Patent number 6,477,908
- Issue date Nov 12, 2002
- Canon Kabushiki Kaisha
- Shinji Wakui
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Anti-vibration system in exposure apparatus
- Patent number 6,473,159
- Issue date Oct 29, 2002
- Canon Kabushiki Kaisha
- Shinji Wakui
- G05 - CONTROLLING REGULATING
Information Patent Grant
Stage system and exposure apparatus
- Patent number 6,448,723
- Issue date Sep 10, 2002
- Canon Kabushiki Kaisha
- Shinji Wakui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Active vibration isolation device and its control method
- Patent number 6,378,672
- Issue date Apr 30, 2002
- Canon Kabushiki Kaisha
- Shinji Wakui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus and method of controlling same
- Patent number 6,359,688
- Issue date Mar 19, 2002
- Canon Kabushiki Kaisha
- Satoshi Akimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and positioning apparatus
- Patent number 6,327,026
- Issue date Dec 4, 2001
- Canon Kabushiki Kaisha
- Shinji Wakui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Anti-vibration apparatus, exposure apparatus using the same, device...
- Patent number 6,322,060
- Issue date Nov 27, 2001
- Canon Kabushiki Kaisha
- Takehiko Mayama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Active vibration isolator, exposure apparatus, exposure method and...
- Patent number 6,286,644
- Issue date Sep 11, 2001
- Canon Kabushiki Kaisha
- Shinji Wakui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Anti-vibration apparatus and exposure apparatus using the same
- Patent number 6,213,443
- Issue date Apr 10, 2001
- Canon Kabushiki Kaisha
- Shinji Wakui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Anti-vibration apparatus and anti-vibration method thereof
- Patent number 6,170,622
- Issue date Jan 9, 2001
- Canon Kabushiki Kaisha
- Shinji Wakui
- G05 - CONTROLLING REGULATING
Information Patent Grant
Anti-vibration apparatus and method
- Patent number 6,128,552
- Issue date Oct 3, 2000
- Canon Kabushiki Kaisha
- Isao Iwai
- G05 - CONTROLLING REGULATING
Information Patent Grant
Stage-drive control apparatus and method, and scan-projection type...
- Patent number 5,900,707
- Issue date May 4, 1999
- Canon Kabushiki Kaisha
- Shinji Wakui
- G05 - CONTROLLING REGULATING
Information Patent Grant
Vibration removing apparatus and method thereof
- Patent number 5,653,317
- Issue date Aug 5, 1997
- Canon Kabushiki Kaisha
- Shinji Wakui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position control system
- Patent number 5,568,032
- Issue date Oct 22, 1996
- Canon Kabushiki Kaisha
- Shinji Wakui
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Positioning system
- Patent number 5,545,962
- Issue date Aug 13, 1996
- Canon Kabushiki Kaisha
- Shinji Wakui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Precision positioning apparatus
- Patent number 5,511,930
- Issue date Apr 30, 1996
- Canon Kabushiki Kaisha
- Mikio Sato
- G05 - CONTROLLING REGULATING
Information Patent Grant
Stage driving system
- Patent number 5,504,407
- Issue date Apr 2, 1996
- Canon Kabushiki Kaisha
- Shinji Wakui
- G05 - CONTROLLING REGULATING
Information Patent Grant
Control apparatus for vertical vibration elimination table
- Patent number 5,478,043
- Issue date Dec 26, 1995
- Canon Kabushiki Kaisha
- Shinji Wakui
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Control system for magnetic bearing
- Patent number 5,013,987
- Issue date May 7, 1991
- Seiko Instruments Inc.
- Shinji Wakui
- G05 - CONTROLLING REGULATING
Information Patent Grant
Objective lens apparatus
- Patent number 4,650,294
- Issue date Mar 17, 1987
- Seiko Instruments & Electronics Ltd.
- Ikuo Nanno
- G11 - INFORMATION STORAGE

Patents Applicationslast 30 patents

Information Patent Application
Temperature adjusting system in exposure apparatus
- Publication number 20030111458
- Publication date Jun 19, 2003
- Canon Kabushiki Kaisha
- Shinji Wakui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Active vibration isolator and exposure apparatus with the active vi...
- Publication number 20030057346
- Publication date Mar 27, 2003
- Shinji Wakui
- G05 - CONTROLLING REGULATING
Information Patent Application
PROJECTION EXPOSURE APPARATUS AND METHOD OF CONTROLLING SAME
- Publication number 20020001082
- Publication date Jan 3, 2002
- SATOSHI AKIMOTO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ANTI-VIBRATION APPARATUS, EXPOSURE APPARATUS USING THE SAME, DEVICE...
- Publication number 20010040324
- Publication date Nov 15, 2001
- FITZPATRICK CELLA HARPER & SCINTO
- TAKEHIKO MAYAMA
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
Active anti-vibration apparatus and exposure apparatus
- Publication number 20010011697
- Publication date Aug 9, 2001
- Shinji Wakui
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...

SHINJI WAKUI

Person

Patents Grantslast 30 patents

Exposure apparatus anti-vibration apparatus, system identification...

Temperature adjusting system in exposure apparatus

Active anti-vibration apparatus and exposure apparatus

Pedestal with vibration sensor, and exposure apparatus having the same

Anti-vibration system in exposure apparatus

Stage system and exposure apparatus

Active vibration isolation device and its control method

Projection exposure apparatus and method of controlling same

Exposure apparatus and positioning apparatus

Anti-vibration apparatus, exposure apparatus using the same, device...

Active vibration isolator, exposure apparatus, exposure method and...

Anti-vibration apparatus and exposure apparatus using the same

Anti-vibration apparatus and anti-vibration method thereof

Anti-vibration apparatus and method

Stage-drive control apparatus and method, and scan-projection type...

Vibration removing apparatus and method thereof

Position control system

Positioning system

Precision positioning apparatus

Stage driving system

Control apparatus for vertical vibration elimination table

Control system for magnetic bearing

Objective lens apparatus

Patents Applicationslast 30 patents

Temperature adjusting system in exposure apparatus

Active vibration isolator and exposure apparatus with the active vi...

PROJECTION EXPOSURE APPARATUS AND METHOD OF CONTROLLING SAME

ANTI-VIBRATION APPARATUS, EXPOSURE APPARATUS USING THE SAME, DEVICE...

Active anti-vibration apparatus and exposure apparatus