Shinji Yashima

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of manufacturing semiconductor device and non-transitory com...
- Patent number 12,014,943
- Issue date Jun 18, 2024
- Kokusai Electric Corporation
- Akinori Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device and non-transitory com...
- Patent number 11,519,815
- Issue date Dec 6, 2022
- Kokusai Electric Corporation
- Akinori Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method for manufacturing semicon...
- Patent number 9,171,724
- Issue date Oct 27, 2015
- HITACHI KOKUSAIELECTRIC INC.
- Shinji Yashima
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate processing apparatus having rotatable slot-type antenna a...
- Patent number 8,987,645
- Issue date Mar 24, 2015
- Hitachi Kokusai Electric Inc.
- Unryu Ogawa
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate processing apparatus and method of manufacturing a semico...
- Patent number 8,557,720
- Issue date Oct 15, 2013
- Hitachi Kokusai Electric, Inc.
- Tokunobu Akao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method of manufacturing a semico...
- Patent number 8,486,222
- Issue date Jul 16, 2013
- Hitachi Kokusai Electric Inc.
- Tokunobu Akao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 8,471,477
- Issue date Jun 25, 2013
- Hitachi Kokusai Electric, Inc.
- Masayuki Tomita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device producing method and semiconductor device prod...
- Patent number 7,045,447
- Issue date May 16, 2006
- Hitachi Kokusai Electric Inc.
- Unryu Ogawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Method of Manufacturing Semiconductor Device and Non-transitory Com...
- Publication number 20230067800
- Publication date Mar 2, 2023
- Kokusai Electric Corporation
- Akinori TANAKA
- G01 - MEASURING TESTING
Information Patent Application
Method of Manufacturing Semiconductor Device and Non-transitory Com...
- Publication number 20210172825
- Publication date Jun 10, 2021
- Kokusai Electric Corporation
- Akinori TANAKA
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD FOR MANUFACTURING SEMICON...
- Publication number 20130072034
- Publication date Mar 21, 2013
- Hitachi Kokusai Electric Inc.
- Shinji YASHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20120129358
- Publication date May 24, 2012
- Hitachi Kokusai Electric Inc.
- Unryu OGAWA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING A SEMICO...
- Publication number 20120108080
- Publication date May 3, 2012
- Hitachi Kokusai Electric Inc.
- Tokunobu AKAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING A SEMICO...
- Publication number 20120108061
- Publication date May 3, 2012
- Hitachi Kokusai Electric, Inc.
- Tokunobu AKAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20110234100
- Publication date Sep 29, 2011
- Hitachi Kokusai Electric Inc.
- Masayuki TOMITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and electrode member
- Publication number 20090255630
- Publication date Oct 15, 2009
- Hitachi Kokusai Electric Inc.
- Kazuyuki Toyoda
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Semiconductor device producing method and semiconductor device prod...
- Publication number 20030224616
- Publication date Dec 4, 2003
- Unryu Ogawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor device producing method and semiconductor device prod...
- Publication number 20030219989
- Publication date Nov 27, 2003
- Tadashi Terasaki
- H01 - BASIC ELECTRIC ELEMENTS

Shinji Yashima

Person

Patents Grantslast 30 patents

Method of manufacturing semiconductor device and non-transitory com...

Method of manufacturing semiconductor device and non-transitory com...

Substrate processing apparatus and method for manufacturing semicon...

Substrate processing apparatus having rotatable slot-type antenna a...

Substrate processing apparatus and method of manufacturing a semico...

Substrate processing apparatus and method of manufacturing a semico...

Substrate processing apparatus and method of manufacturing semicond...

Semiconductor device producing method and semiconductor device prod...

Patents Applicationslast 30 patents

Method of Manufacturing Semiconductor Device and Non-transitory Com...

Method of Manufacturing Semiconductor Device and Non-transitory Com...

SUBSTRATE PROCESSING APPARATUS AND METHOD FOR MANUFACTURING SEMICON...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING A SEMICO...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING A SEMICO...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

Substrate processing apparatus and electrode member

Semiconductor device producing method and semiconductor device prod...

Semiconductor device producing method and semiconductor device prod...